A.A. ROGACHEV, P.A. LUCHNIKOV, AND A.V. ROGACHEV

C.V. DAYNEKO, K.V. ZAKHARCHENKO, V.I. ZOLOTAREVSKY, K.E. MOCHALOV, V. A. OLEYNIKOV, M.G. TEDORADZE, A.R. TANEEV, A.V. CHISTOLINOV, A.A. CHISTYAKOV

O.M. ZHIGALINA, V.M. MUKHORTOV, Y.I. GOLOVKO, A.L. CHUVILIN, A.N. KUSKOVA

Alexandrov A.F.

M.B. Guseva, V.G. Babaev, Khvostov V.V., Savchenko N.F.

O.M. ZHIGALINA, V.M. MUKHORTOV, Y.I. GOLOVKO, A.L. CHUVILIN, A.N. KUSKOVA

O.M. Zhigalina, V.M. Mukhortov, Y.I. Golovko, A.L. Chuvilin, A.N. Kuskova

I.P. Pronin, E.Yu. Kaptelov, S.V. Senkevich, E.Yu. Flegontova, V.P. Pronin, D.M. Dolgintsev

I.G. Mironenko, А.А. Ivanov, А.А. Semenov, D.V. Velkin

V.V. Sorochan

A.V. Kosobutsky, S.D. Shandarov, O.G. Sevostyanov, N.S. Zvidentsova, M.S. Rybakov, and A.A. Vladimirov

M.A. Karpov, I.V. Borisenko, G.A. Ovsyannikov

A.S. Elshin - Trainee researcher, Moscow State Technical University of Radio Engineering, Electronics and Automation. E-mail: elshin_andrew@mail.ru N.Yu. Firsova - Trainee researcher, Moscow State Technical University of Radio Engineering, Electronics and Automation. E-mail: natfirsova@gmail.com E.D. Mishina - Dr. Sc. (Phys.-Math.), Professor, Moscow State Technical University of Radio Engineering, Electronics and Automation. E-mail: mishi-na_elena57@mail.ru O.M. Zhigalina - Тainee researcher, Shubnikiv Institut of crystallograhy Russian Academy of Sciences (ICRAS). E-mail: zhigal@ns.crys.ras.ru D.A. Abdullaev Trainee researcher, Moscow State Technical University of Radio Engineering, Electronics and Automation D.A. Kiselev - Ph. D. (Phys.-Math.), MISA National University of Science and Technology (Moscow)

A.S. Elshin - Trainee Researcher, Moscow State Technical University of Radio Engineering, Electronics and Automation. E-mail: elshin_andrew@mail.ru N.Yu. Firsova - Trainee Researcher, Moscow State Technical University of Radio Engineering, Electronics and Automation. E-mail: natfirsova@gmail.com O.M. Zhigalina - Тainee Researcher, Shubnikiv Institut of crystallograhy Russian Academy of Sciences (ICRAS). E-mail:zhigal@ns.crys.ras.ru E.D. Mishina - Dr. Sc. (Phys.-Math.), Professor, Moscow State Technical University of Radio Engineering, Electronics and Automation. E-mail: mishina_elena57@mail.ru

R.N. Nenashev - Post-graduate Student, Moscow Technological University (MIREA). E-mail: nenashev@mirea.ru N.M. Kotova - Senior Engineer, Moscow Technological University (MIREA). Е-mail: kotova1953@yandex.ru

R.I. Batalov - Ph.D. (Phys.-Math.), Senior Research Scientist, E.K. Zavoyskii Kazan Physical-Technical Institute of RAS E-mail: batalov@kfti.knc.ru R.M. Bayazitov - Dr.Sc. (Phys.-Math.), Leading Research Scientist, E.K. Zavoyskii Kazan Physical-Technical Institute of RAS, Kazan State Power Engineering University E-mail: batalov@kfti.knc.ru I.A. Faizrakhmanov - Dr.Sc. (Phys.-Math.), Chief Research Scientist, E.K. Zavoyskii Kazan Physical-Technical Institute of RAS E-mail: batalov@kfti.knc.ru G.D. Ivlev - Ph.D. (Phys.-Math.), Senior Research Scientist, Belarussian State University, Minsk, Belarus

T.A. Shayhulov - Student, Bauman Moscow State Technical University; Engineer, Kotelnikiv IRE RAS E-mail: shcaihulov@hitech.cplire.ru V.A. Shahunov - Ph.D. (Eng.), Chief Research Scientist, Kotelnikov IRE RAS (Moscow) V.V. Demidov - Dr.Sc. (Phys.-Math.), Leading Research Scientist, Kotelnikov IRE RAS (Moscow) G.A. Ovsyannikov - Dr.Sc. (Phys.-Math.), Head of Laboratory, Kotelnikov IRE RAS (Moscow)

A.V. Frolov, A.P. Orlov, A.G. Temiryazev

Fryazino branch of Kotelnikov Institute of Radioengineering and Electronics of RAS (Fryazino, Russia) 

F.A. Baron – Dr.Sc. (Eng.), Deputy Chief Technology Officer of Microelectronics Division, JSC «SPE «Radiosviaz» (Krasnoyarsk)
S.Z. Galeev – Deputy Manager of Microelectronics Production Line, JSC «SPE «Radiosviaz» (Krasnoyarsk)
F.V. Zelenov – Process Engineer, JSC «SPE «Radiosviaz» (Krasnoyarsk)
A.B. Ivanov – Process Engineer, JSC «SPE «Radiosviaz» (Krasnoyarsk)
S.O. Konovalov – Process Engineer, JSC «SPE «Radiosviaz» (Krasnoyarsk)
А.N. Masyugin – Process Engineer, JSC «SPE «Radiosviaz» (Krasnoyarsk)
A.V. Strezh – Chief Technologist, JSC «SPE «Radiosviaz» (Krasnoyarsk)
E-mail: filippbaron@mail.ru

A.V. Frolov1, A.P. Orlov2, A.G. Temiryazev3

1-4 Fryazino branch of Kotelnikov Institute of Radioengineering and Electronics of RAS (Fryazino, Russia)

F.А. Baron – Dr.Sc. (Eng.), Deputy Chief Technology Officer of Microelectronics Division,

JSC «SPE «Radiosvyaz» (Krasnoyarsk)

E-mail: filippbaron@mail.ru

S.О. Konovalov – Process Engineer,

JSC «SPE «Radiosvyaz» (Krasnoyarsk)

F.V. Zelenov – Process Engineer,

JSC «SPE «Radiosvyaz» (Krasnoyarsk)

А.N. Masyugin – Process Engineer,

JSC «SPE «Radiosvyaz» (Krasnoyarsk)

А.B. Ivanov – Process Engineer,

JSC «SPE «Radiosvyaz» (Krasnoyarsk)

А.V. Strezh – Chief Technology,

JSC «SPE «Radiosvyaz» (Krasnoyarsk)

A.E. Komlev1, V.A. Volpyas2, R.A. Platonov3, A.G. Altynnikov4, A.B. Kozyrev5

St. Petersburg Electrotechnical University “LETI”, St. Petersburg, Russia
 

D.S. Manegin1, V.D. Sokolov2, S.O. Shilov3, E.V. Vorobev4, O.P. Plotnikova5, S.G. Ivakhnenko6

1-6 SEC «Ion Plasma Technologies», BMSTU (Moscow, Russia)

1 manegin@bmstu.ru; 2 sokolovvd@bmstu.ru; 3 s.shilov@bmstu.ru; 4 evv@bmstu.ru; 5 plotnikova@bmstu.ru; 6 ivakhnenko@bmstu.ru