A.A. ROGACHEV, P.A. LUCHNIKOV, AND A.V. ROGACHEV

There is considered the intermolecular interaction mechanism at formation of fluoride polymer coatings from active gaseous phase in the initial growth stages. It is found that polymer microparticles begin growing at the active centra of the substrate whose density is fairly low. The formation of vacuum fluoride polymer coatings in camera is governed by two main mechanisms: adsorption-polymerization and aerosol (droplet) ones. The sequential stages of layer deposition are discussed. Morphological peculiarities of nanosize fluoride polymer films are studied. Growth parameters strongly depend on ionic pre-treatment of silicon substrate. Thermal treatment of deposited films gives rise to almost double value of surface energy of fluoride polymer coating