Journals
Books
Articles by keyword MEMS
The Achievements of Modern Microacoustics: SAW and BAW Technologies in Different Electronic Equipment. The Impact of MEMS Technologies on Different Electronic Equipment
S. A. Dobershtein, I. V. Goncharov
Surface defects influence on microcantilever dynamic properties
G.N. Gaidukov, P.S. Pagin
Actuator MEMS devices based on bi-metal composite material shape memory effect
A.V. Mashirov
Estimation open-frame structural strength of microelectromechanical systems
P.I. Didik, A.A. Zhukov
Effect of mollecular additives on interior stress decrease in nanostructured sol-gel PZT films
P.Р. Lavrov - Рost-graduate Student, Stagier-Researcher, MGTU MIREA. Е-mail: lavrov@mirea.ru
A.V. Kornyukhin - Рost-graduate Student, MGTU MIREA. Е-mail: lavrov@mirea.ru
Inclination of the radiolocation station antenna-s vertical axis determination using MEMS accelerometers
A.P. Kudrevich - Design Engineer, JSC «SPE «Radio and Communication»; Post-graduate Student, Engineering Physics and Radioelectronics Institute, Siberian Federal Universit (Krasnoyarsk) E-mail: kudry@mail.ru A.V. Grebennikov - Head of Sector, JSC «SPE «Radio and Communication»; Ph.D. (Eng.), Head of Department, Engineering Physics and Radioelectronics Institute, Siberian Federal Universit (Krasnoyarsk) E-mail: berg24@mail.ru
An estimate for the quality factor of a beam microcavity taking into account the multilayer structure of its structure

А.R. Bestugin – Dr.Sc. (Eng.), Professor, Director of Institute of Radio Engineering, Electronics and Communication, 

Saint Petersburg State University of Aerospace Instrumentation

О.М. Filonov – Ph.D. (Eng.), Associate Professor, Saint Petersburg State University of Aerospace Instrumentation

N.А. Ovchinnikova – Ph.D. (Eng.), Associate Professor, Saint Petersburg State University of Aerospace Instrumentation

I.А. Kirshina – Ph.D. (Econ.), Associate Professor, Saint Petersburg State University of Aerospace Instrumentation P.А. Okin - Post-graduate Student, Saint Petersburg State University of Aerospace Instrumentation E-mail: fresguap@mail.ru

Review of optical and inertial systems for recording the relative position and movement of the human spine

A.S. Danilova1, O.V. Tikhonenkova2, T.V. Sergeev3, A.B. Chkhindjeria4

1–4 Saint-Petersburg State University of Aerospace Instrumentation (Saint-Petersburg, Russia)

Navigation system for the antenna tracking on board a small UAV

.I. Kulakova – Ph.D. (Eng.), Head of Department, LTD «Special Technological Center» (St. Petesburg) A.Yu. Sokharev – Leading Research Scientist, LTD «Special Technological Center» (St. Petesburg) 

Analysis of the dependence of the kinetic energy dissipation process in microcavities on the ambient temperature

А.R. Bestugin – Dr.Sc. (Eng.), Professor, Director of Institute of Radio Engineering, Electronics and Communication,
Saint Petersburg State University of Aerospace Instrumentation
О.М. Filonov – Ph.D. (Eng.), Associate Professor, Saint Petersburg State University of Aerospace Instrumentation
I.А. Kirshina – Ph.D. (Econ.), Associate Professor, Saint Petersburg State University of Aerospace Instrumentation
P.А. Okin – Post-graduate Student, Saint Petersburg State University of Aerospace Instrumentation
E-mail: fresguap@mail.ru

Autonomous attitude determination of a small fixed-wing UAV

A.O. Markov – Senior Research Scientist,

LTD «STC» (St. Petersburg)

E-mail: alex.o.markov@gmail.com

S.F. Burdakov – Dr.Sc. (Eng.), Professor,

Peter the Great St. Peterburg Polytechnic University

E-mail: burdakov.s@yandex.ru

Method of package calibration of MEMS-sensors: gyroscopes and accelerometers

N.V. Tsipina − Ph.D. (Eng.), Associate Professor, 

Department of Design and Production of Radio Equipment

FSBEI of HE «Voronezh State Technical University» (Voronezh, Russia)

E-mail: kipr@vorstu.ru

Ya.V. Skitsky – Bachelor, 

FSBEI of HE «Voronezh State Technical University» (Voronezh, Russia)

E-mail: kipr@vorstu.ru

A.E. Privalova – Bachelor,

FSBEI of HE «Voronezh State Technical University» (Voronezh, Russia)

E-mail: kipr@vorstu.ru

Yu.A. Pirogov – Post-graduate Student,

FSBEI of HE «Voronezh State Technical University» (Voronezh, Russia)

E-mail: kipr@vorstu.ru

P.P. Churakov – Dr.Sc. (Eng.), Professor, 

Department of Information-measuring Equipment and Metrology,

FSBEI of HE «Penza State University» (Penza, Russia) E-mail: fait@pnzgu.ru

Optimization of magnetic concentrators of magnetically controlled MEMS switches

S.M. Karabanov - Dr.Sc. (Eng.), Professor of Department of Electronic technology,
Laureate of the Prize of the Government of the Russian Federation from the Field of Science and Technology

D. V. Suvorov - Ph.D. (Eng.), Associate Professor of Department of Industrial Electronics

G.P. Gololobov - Ph.D. (Eng.), Associate Professor of Department of Industrial Electronics

D.Yu. Tarabrin - Ph.D. (Eng.), Associate Professor of Department of Industrial Electronics

E.V. Slivkin - Ph.D. (Eng.), Associate Professor of Department of Industrial Electronics

E.M. Grigor’ev - Director of the Kasimov Instrument Plant,
Laureate of the competition named after Peter the Great «Best Manager of Russia for 2000»б
Laureate of the Ryazan Region Prize for Science and Technology named after Academician V.F. Utkin

Support system for performing rehabilitation exercises for knee joint based on smartphone

M.S. Ashapkina
Post-graduate Student, Department «Micro- and Nanoelectronics»;
Assistant, Department «Automation and Information Technologies in Management»,
Ryazan State Radio Engineering University

E-mail: mashaashapkina@gmail.com
A.V. Alpatov
Ph.D. (Eng.), Associate Professor, Department «Micro- and Nanoelectronics»,
Ryazan State Radio Engineering University

E-mail: alpatov-alexey@yandex.ru
A.A. Chekushin
Ph.D.(Med.), Assistant, Department «General Surgery»,
Ryazan State Medical University named after academician I.P. Pavlov

E-mail: rmi-62@rambler.ru

Parametric identification of the MEMS-accelerometer model during its calibration using a numerical solution of the sensitivity equation

Andrashitov D.S.1, Kostoglotov A.A.2, Lazarenko S.V.3, Shupletsov A.M.4

1 Military Academy of Strategic Rocket Troops after Peter the Great (Balashikha, Moscow Region, Russia)

2,3 Don State Technical University (Rostov-on-Don, Russia)

4 Rostov State University of Railway Engineering (Rostov-on-Don, Russia)

1dima-andrahitov@rambler.ru, 2kostoglotov@icloud.com, 3lazarenkosv@icloud.com, 3shupletsov83@mail.ru

Optimization of a waveguide-slot phase shifter controlled by a system of p-i-n-diodes or MEMS switches

Nguyen Ha Nam1, A.A. Sochava2, K.V. Greshnevikov3, S.V. Bogachev4, A.S. Cherepanov5, D.V. Dikiy6

1-6 Peter the Great St. Petersburg Polytechnic University (St. Petersburg, Russia)

1 nguyenhanama1@gmail.com; 2 sochava@spbstu.ru; 3 greshnev_kv@spbstu.ru; 4 bogachev_sv@spbstu.ru; 5 cherepanov@spbstu.ru; 6 dikij_dv@spbstu.ru

Vibration sensor as the basis of an equipment monitoring system

E.S. Yanov1, A.V. Antsev2, M.S. Vorotilin3, E.I. Minakov4, S.V. Prokopchina5

1 JSC NPO «SPLAV named after. A.N. Ganichev» (Tula, Russia)

2–4 Tula State University (Tula, Russia)

5 Financial University under Government of Russian Federation (Moscow, Russia)

1dexaik@mail.ru