N.V. Tsipina − Ph.D. (Eng.), Associate Professor,
Department of Design and Production of Radio Equipment
FSBEI of HE «Voronezh State Technical University» (Voronezh, Russia)
E-mail: kipr@vorstu.ru
Ya.V. Skitsky – Bachelor,
FSBEI of HE «Voronezh State Technical University» (Voronezh, Russia)
E-mail: kipr@vorstu.ru
A.E. Privalova – Bachelor,
FSBEI of HE «Voronezh State Technical University» (Voronezh, Russia)
E-mail: kipr@vorstu.ru
Yu.A. Pirogov – Post-graduate Student,
FSBEI of HE «Voronezh State Technical University» (Voronezh, Russia)
E-mail: kipr@vorstu.ru
P.P. Churakov – Dr.Sc. (Eng.), Professor,
Department of Information-measuring Equipment and Metrology,
FSBEI of HE «Penza State University» (Penza, Russia) E-mail: fait@pnzgu.ru
Formulation of the problem. Microelectromechanical systems (MEMS) are one of the most advanced technologies that can significantly improve the characteristics of electronic equipment, as well as create devices for solving problems in completely new areas. The popularity of these devices is due to the simplicity of their use, not a high price and small size. MEMS-sensors are typically equipped with integrated signal processing electronics and do not have moving parts. This determines their high reliability and ability to provide stable readings in harsh environmental conditions (temperature drops, shock, humidity, vibration, electromagnetic and highfrequency interference). Over the past few years, MEMS-sensors have become widespread around the world. Each smartphone is equipped with a MEMS-sensor, which means a multi-million-year production of these devices. To produce reliable and high-quality MEMS-sensors, it is necessary to organize calibration and rejection of faulty products at the production site. At most enterprises, calibration and testing of each sensor individually on the conveyor is organized, which significantly increases the manufacturing time and, as a result, increases the cost of the product.
Purpose. To develop a method and algorithm for batch (parallel) calibration and testing of MEMS-sensors (accelerometers and gyroscopes) in exchange for a sequential one, in order to reduce labor costs and manufacturing time of such devices with a given level of reliability and quality.
Results. Based on the proposed method and algorithm for batch calibration and rejection, a significant performance gain was achieved in the mass production of MEMS-sensors. The proposed method allows the simultaneous calibration of 16 sensors on one test table with the simultaneous rejection of defective products.
Practical significance. The results can be used in the mass and large-scale production of MEMS-sensors (accelerometers and gyroscopes). The proposed batch calibration and rejection significantly speeds up and reduces the cost of manufacturing MEMS-devices and becomes indispensable in modern technological processes.
- Mishra M.K., Dubey V., Mishra P.M., Khan I. MEMS Technology: A Review. Journal of Engineering Research and Reports. 2019. V. 4. № 1. Р. 1−24. https://doi.org/10.9734/jerr/2019/v4i116891.
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- Bashkirov A.V., Muratov A.V., Horoshajlova M.V., Sitnikov A.V., Ermakov S.A. Nizkoplotnostnye kody maloj moshhnosti dekodirovanija. Radiotehnika. 2016. № 5. S. 32−37 (In Russian).