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Articles by keyword MEMS-devices
Method of package calibration of MEMS-sensors: gyroscopes and accelerometers

N.V. Tsipina − Ph.D. (Eng.), Associate Professor, 

Department of Design and Production of Radio Equipment

FSBEI of HE «Voronezh State Technical University» (Voronezh, Russia)

E-mail: kipr@vorstu.ru

Ya.V. Skitsky – Bachelor, 

FSBEI of HE «Voronezh State Technical University» (Voronezh, Russia)

E-mail: kipr@vorstu.ru

A.E. Privalova – Bachelor,

FSBEI of HE «Voronezh State Technical University» (Voronezh, Russia)

E-mail: kipr@vorstu.ru

Yu.A. Pirogov – Post-graduate Student,

FSBEI of HE «Voronezh State Technical University» (Voronezh, Russia)

E-mail: kipr@vorstu.ru

P.P. Churakov – Dr.Sc. (Eng.), Professor, 

Department of Information-measuring Equipment and Metrology,

FSBEI of HE «Penza State University» (Penza, Russia) E-mail: fait@pnzgu.ru