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Articles by keyword MEMS-devices
N.V. Tsipina − Ph.D. (Eng.), Associate Professor,
Department of Design and Production of Radio Equipment
FSBEI of HE «Voronezh State Technical University» (Voronezh, Russia)
E-mail: kipr@vorstu.ru
Ya.V. Skitsky – Bachelor,
FSBEI of HE «Voronezh State Technical University» (Voronezh, Russia)
E-mail: kipr@vorstu.ru
A.E. Privalova – Bachelor,
FSBEI of HE «Voronezh State Technical University» (Voronezh, Russia)
E-mail: kipr@vorstu.ru
Yu.A. Pirogov – Post-graduate Student,
FSBEI of HE «Voronezh State Technical University» (Voronezh, Russia)
E-mail: kipr@vorstu.ru
P.P. Churakov – Dr.Sc. (Eng.), Professor,
Department of Information-measuring Equipment and Metrology,
FSBEI of HE «Penza State University» (Penza, Russia) E-mail: fait@pnzgu.ru