Journal Achievements of Modern Radioelectronics №2 for 2018 г.
Article in number:
An estimate for the quality factor of a beam microcavity taking into account the multilayer structure of its structure
Type of article: scientific article
UDC: 621.382.06
Authors:

А.R. Bestugin – Dr.Sc. (Eng.), Professor, Director of Institute of Radio Engineering, Electronics and Communication, 

Saint Petersburg State University of Aerospace Instrumentation

О.М. Filonov – Ph.D. (Eng.), Associate Professor, Saint Petersburg State University of Aerospace Instrumentation

N.А. Ovchinnikova – Ph.D. (Eng.), Associate Professor, Saint Petersburg State University of Aerospace Instrumentation

I.А. Kirshina – Ph.D. (Econ.), Associate Professor, Saint Petersburg State University of Aerospace Instrumentation P.А. Okin - Post-graduate Student, Saint Petersburg State University of Aerospace Instrumentation E-mail: fresguap@mail.ru

Abstract:

The paper considers an improved technique for calculating the quality factor of micromechanical resonators used as secondary measuring transducers in MEMS with a frequency-modulated output signal. Based on the solution of the thermoelasticity equation for a given oscillatory system, a temperature distribution in the resonator volume is found, which allows calculating the thermoelastic component of internal friction in the beam and obtaining an improved Q value.

Pages: 46-50
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Date of receipt: 1 декабря 2017 г.