А.R. Bestugin – Dr.Sc. (Eng.), Professor, Director of Institute of Radio Engineering, Electronics and Communication,
Saint Petersburg State University of Aerospace Instrumentation
О.М. Filonov – Ph.D. (Eng.), Associate Professor, Saint Petersburg State University of Aerospace Instrumentation
N.А. Ovchinnikova – Ph.D. (Eng.), Associate Professor, Saint Petersburg State University of Aerospace Instrumentation
I.А. Kirshina – Ph.D. (Econ.), Associate Professor, Saint Petersburg State University of Aerospace Instrumentation P.А. Okin - Post-graduate Student, Saint Petersburg State University of Aerospace Instrumentation E-mail: fresguap@mail.ru
The paper considers an improved technique for calculating the quality factor of micromechanical resonators used as secondary measuring transducers in MEMS with a frequency-modulated output signal. Based on the solution of the thermoelasticity equation for a given oscillatory system, a temperature distribution in the resonator volume is found, which allows calculating the thermoelastic component of internal friction in the beam and obtaining an improved Q value.
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