А.R. Bestugin – Dr.Sc. (Eng.), Professor, Director of Institute of Radio Engineering, Electronics and Communication,
Saint Petersburg State University of Aerospace Instrumentation
О.М. Filonov – Ph.D. (Eng.), Associate Professor, Saint Petersburg State University of Aerospace Instrumentation
I.А. Kirshina – Ph.D. (Econ.), Associate Professor, Saint Petersburg State University of Aerospace Instrumentation
P.А. Okin – Post-graduate Student, Saint Petersburg State University of Aerospace Instrumentation
E-mail: fresguap@mail.ru
In this paper, we study problems related to the decrease in the drift of the fundamental frequency of micromechanical resonators due to their heating in the course of operation because of the inevitable dissipation of the kinetic energy in the elastic element by thermoelastic internal friction. For the mathematical description of thermoelastic internal friction, the model of K. Zener, corresponding to the standard linear body, was used in this paper. It is shown that a decrease in the drift, and consequently of the error of the MEMS as a whole, can be achieved by lowering the temperature at the attachment points of the resonator to the MEMS sensitive element.
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