350 rub
Journal Science Intensive Technologies №7 for 2011 г.
Article in number:
Surface defects influence on microcantilever dynamic properties
Keywords: MEMS surface frequency FEM
Authors:
G.N. Gaidukov, P.S. Pagin
Abstract:
Theory is compared with the finite element method results. There is also rough surface description and corresponding frequency shift described in the article. FEM model also calculated for that case.
Pages: 54-56
References
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