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Articles by keyword wafer
Semi-insulating 6H-SiC wafers for modern electronics
A. A. Lebedev - D.Sc. (Phys.-Math.), Professor, FTI named after A. F. Ioffe, St.-Peterburg. E-mail: Shura.lebe@mail.ioffe.ru
S. V. Belov - FTI named after A. F. Ioffe, St.-Peterburg. E-mail: Sergey@mail.ioffe.ru
S. P. Lebedev - Junior Research Scientist, FTI named after A. F. Ioffe, St.-Peterburg
D. P. Litvin - Research Scientist, FTI named after A. F. Ioffe, St.-Peterburg I. P. Nikitina - Senior Engineer, FTI named after A. F. Ioffe, St.-Peterburg. E-mail: irina.nikitina45@gmail.com
A. V. Vasiliev - Deputy General Director, Yu. N. Makarov - Ph.D. (Phys.-Math.), General Director
S. S. Nagalyuk - Leading Engineer
A. N. Smirnov - D.Sc. (Phys.-Math.), Senior Research Scientist, FTI named after A. F. Ioffe, St.-Peterburg. E-mail: Alex.Smirnov@mail.ioffe.ru
V. V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg
V. N. Vyuginov - Ph.D. (Eng.), Director, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: mail@svetlana-ep.ru
R. G. Shifman - Deputy Director - Head of SCD, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: okb@svetlana-ep.ru
Yu. S. Kuzmichev - Head of Laboratory, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: okb@svetlana-ep.ru
N. K. Travin - Leading Engineer, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: travin@svetlana-ep.ru
O. V. Venediktov - Engineer, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: venoleg@gmail.com
The production technology of SiC bulk crystal slicing
V. V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg
V. N. Vyuginov - Ph.D. (Eng.), Director, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: mail@svetlana-ep.ru
N. K. Travin - Leading Engineer, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: travin@svetlana-ep.ru
The optimization of the mechanical surface processing technology of SiC wafers
V. V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg
V. N. Vyuginov - Ph.D. (Eng.), Director, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: mail@svetlana-ep.ru
N. K. Travin - Leading Engineer, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: travin@svetlana-ep.ru
The production development of finish surface processing technology of SiC epi-ready wafers
V. V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg
Resistivity measuring methods of the semi-insulating SiC wafers
V. V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg
The temperature effect on resistivity of SiC wafers
V. V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg
Semi-insulating 6H-SiC wafers for modern electronics
A. A. Lebedev - D.Sc. (Phys.-Math.), Professor, FTI named after A. F. Ioffe, St.-Peterburg. E-mail: Shura.lebe@mail.ioffe.ru
S. V. Belov - FTI named after A. F. Ioffe, St.-Peterburg. E-mail: Sergey@mail.ioffe.ru
S. P. Lebedev - Junior Research Scientist, FTI named after A. F. Ioffe, St.-Peterburg
D. P. Litvin - Research Scientist, FTI named after A. F. Ioffe, St.-Peterburg I. P. Nikitina - Senior Engineer, FTI named after A. F. Ioffe, St.-Peterburg. E-mail: irina.nikitina45@gmail.com
A. V. Vasiliev - Deputy General Director
Yu. N. Makarov - Ph.D. (Phys.-Math.), General Director
S. S. Nagalyuk - Leading Engineer
A. N. Smirnov - D.Sc. (Phys.-Math.), Senior Research Scientist, FTI named after A. F. Ioffe, St.-Peterburg. E-mail: Alex.Smirnov@mail.ioffe.ru
V. V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg V. N. Vyuginov - Ph.D. (Phys.-Math.), Director, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: mail@svetlana-ep.ru
R. G. Shifman - Deputy Director - Head of SCD, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: okb@svetlana-ep.ru
Yu. S. Kuzmichev - Head of Laboratory, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: okb@svetlana-ep.ru
N. K. Travin - Leading Engineer, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: travin@svetlana-ep.ru
O. V. Venediktov - Engineer, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: venoleg@gmail.com
The optimization of the mechanical surface processing technology of SiC wafers
V. V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg V. N. Vyuginov - Ph.D. (Phys.-Math.), Director, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: mail@svetlana-ep.ru N. K. Travin - Leading Engineer, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: travin@svetlana-ep.ru
The production technology of SiC bulk crystal slicing
V. V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg
V. N. Vyuginov - Ph.D. (Phys.-Math.), Director, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: mail@svetlana-ep.ru
N. K. Travin - Leading Engineer, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: travin@svetlana-ep.ru
Resistivity measuring methods of the semi-insulating SiC wafers
V. V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg
The production development of finish surface processing technology of SiC epi-ready wafers
V. V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg
The production technology of SiC bulk crystal slicing
V.V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg V.N. Vyuginov - Ph.D. (Phys.-Math.), Director, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: mail@svetlana-ep.ru N.K. Travin - Leading Engineer, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: travin@svetlana-ep.ru
Mathematical model of the pressure distribution on silicon wafers during two-sided polishing

I.I. Danilov1, N.G. Nazarov2, D.D. Dmitriev3, S.N. Sinavchian4, V.S. Sinavchian5

1–5 Bauman Moscow State Technical University (Moscow, Russia)

Mathematical model of double-sided polishing of a group of simultaneously processed silicon wafers

I.I. Danilov1, N.G. Nazarov2, D.D. Dmitriev3, S.N. Sinavchian4, V.S. Sinavchian5

1–5 Bauman Moscow State Technical University (Moscow, Russia)

Reduction of radiation defects in MIS structures using a multilayer resist based on a refractory metal

N.V. Cherkesova1, G.A. Mustafaev2, A.G. Mustafaev3

1,2 Kabardino-Balkarian State University, (Nalchik, Russia)
3 Dagestan State University of National Economy (Makhachkala, Russia)
1 natasha07_2002@mail.ru, 2 zoone@mail.ru, 3 arslan_mustafaev@mail.ru