I.I. Danilov1, N.G. Nazarov2, D.D. Dmitriev3, S.N. Sinavchian4, V.S. Sinavchian5
1–5 Bauman Moscow State Technical University (Moscow, Russia)
The production of modern solid-state integrated circuits uses silicon semiconductor wafers as a blank. The accuracy of the geometric shape of the plates required for this is ensured during finishing polishing operations. The most productive is the double–sided polishing of a group of work pieces on the machine. The calculation of the evolution of the geometric shape of the plate during such processing requires the development of a mathematical model of pressure distribution, which depends on the distribution of the workload between the work pieces of the same group during their joint processing on the machine.
Objective – to develop a mathematical model of double-sided polishing of a group of simultaneously processed silicon wafers. A mathematical model of double-side polishing of a group of simultaneously processed silicon wafers allowing to calculate the workload for each wafer has been developed.
Practical significance – the use of the research results allows us to develop a mathematical model of the process of double-sided polishing on a machine of a group of silicon wafers and calculate the optimal technological modes of this operation.
Danilov I.I., Nazarov N.G., Dmitriev D.D., Sinavchian S.N., Sinavchian V.S. Mathematical model of double-sided polishing of a group of simultaneously processed silicon wafers. Nanotechnology: the development, application – XXI Century. 2022. V. 14. № 3. Р. 22−30.
DOI: https://doi.org/10.18127/j22250980-202203-03 (In Russian)
- Danilov I.I., Nazarov N.G., Dmitriyev D.D., Sinavchian S.N., Sinavchian V.S. Matematicheskaya model raspredeleniya davleniya na kremniyevyye plastiny pri dvustoronnem polirovanii. Nanotekhnologii: razrabotka. primeneniye – XXI vek. 2021. T. 13. № 4. S. 60–67. (in Russian).
- Dyuzhikov V.I. Vybor optimalnykh usloviy polirovaniya ploskikh poverkhnostey kvartsevykh plastin. Elektronnaya tekhnika. Ser. 10. 1972. Vyp. 3. S. 100–107. (in Russian).
- Korn G., Korn T. Spravochnik po matematike dlya nauchnykh rabotnikov i inzhenerov. M.: Nauka. 1977. 832 s. (in Russian).