Journals
Books
Articles by keyword polishing
The optimization of the mechanical surface processing technology of SiC wafers
V. V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg
V. N. Vyuginov - Ph.D. (Eng.), Director, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: mail@svetlana-ep.ru
N. K. Travin - Leading Engineer, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: travin@svetlana-ep.ru
The production development of finish surface processing technology of SiC epi-ready wafers
V. V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg
The optimization of the mechanical surface processing technology of SiC wafers
V. V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg V. N. Vyuginov - Ph.D. (Phys.-Math.), Director, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: mail@svetlana-ep.ru N. K. Travin - Leading Engineer, CJSC «Svetlana-Semiconductors», St.-Peterburg. E-mail: travin@svetlana-ep.ru
The production development of finish surface processing technology of SiC epi-ready wafers
V. V. Popov - Ph.D. (Eng.), General Director, JSC «Svetlana», St.-Peterburg
Modeling of surface polishing current-carrying sectional curved waveguide
V.V. Zverintsev - Post-graduate Student, Reshetnev Siberian State Aerospace University (Krasnoyarsk). E-mail: hopmxod007@mail.ru L.V. Zverintseva - Ph. D. (Eng.), Associate Professor, Reshetnev Siberian State Aerospace University (Krasnoyarsk). E-mail: zverintsevalv@mail.ru G.V. Kochkina - Senior Lecturer, Reshetnev Siberian State Aerospace University (Krasnoyarsk). E-mail: kochkina@gmail.com
Mathematical model of the pressure distribution on silicon wafers during two-sided polishing

I.I. Danilov1, N.G. Nazarov2, D.D. Dmitriev3, S.N. Sinavchian4, V.S. Sinavchian5

1–5 Bauman Moscow State Technical University (Moscow, Russia)

Mathematical model of double-sided polishing of a group of simultaneously processed silicon wafers

I.I. Danilov1, N.G. Nazarov2, D.D. Dmitriev3, S.N. Sinavchian4, V.S. Sinavchian5

1–5 Bauman Moscow State Technical University (Moscow, Russia)

Investigation of the kinematics of a new machine for double-sided polishing of optical planeparallel plates

G.R. Sagatelian1, E.R. Piskunova2, N.N. Dubovik3, A.S. Kuznetsov4

1–4 Federal State Budgetary Educational Institution of Higher Education “Bauman Moscow State Technical University (National Research University)” (Moscow, Russia)