G.R. Sagatelian1, E.R. Piskunova2, N.N. Dubovik3, A.S. Kuznetsov4

1–4 Federal State Budgetary Educational Institution of Higher Education “Bauman Moscow State Technical University (National Research University)” (Moscow, Russia)

Required quality indicators of such parts as optical waveguides in diffraction augmented reality systems are currently not provided by the technique of optical grinding and polishing operations. The lack of research dedicated to shaping of precision functional surfaces of plane-parallel plates which have the contour of a rectangle or a more complex polygon is a significant obstacle to the creation of new optoelectronic devices. This work is devoted to the development of a mathematical model of the shaping process during glass polishing, which makes it possible to predict the actual shape of nominally flat processed surfaces of considered types of optical parts.

The purpose – design of the machine for simultaneously polishing of both functional surfaces of a single part, which provides technologically the deviations from flatness of functional surfaces of optical plane-parallel plates in the range of 0.5 - 1.0 microns. 

A method has been developed for calculating the expected shape of the processed surfaces, based on calculating the lengths of the contact arcs of the points of the workpiece surface with the working surface of the polisher. The theoretical possibility of compensation for the initial deviations from flatness in the form of convexity of the workpiece surfaces to be polished is shown. For a given configuration of the contour of the workpiece, the variable factors are the diameter of the polisher, which has the shape of an entire circle, as well as the eccentricity between the axes of rotation of the part and the polisher and the ratio between the frequencies of their rotation. 

The developed method of calculating the shaping of precision optical parts having a complex configuration of their contour on eccentric type machines for double-sided lapping allows to ensure a given flatness and parallelism of functional surfaces by compensating on the operation of double-sided polishing of those systematic errors that were formed on the workpiece as a result of performing the preceding operation of double-sided optical griding.

Sagatelian G.R., Piskunova E.R., Dubovik N.N., Kuznetsova A.S. Investigation of the kinematics of a new machine for double-sided polishing of optical planeparallel plates. Nanotechnology: the development, application – XXI Century. 2022. V. 14. № 3. Р. 47−55. DOI: https://doi.org/10.18127/j22250980-202203-06 (In Russian)

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