I.K. Beysembetov, K.Kh. Nusupov, N.B. Beysenkhanov, S.K.Zharikov, B.K. Kenzhaliev, T.K. Akhmetov, R. Ivlev

A.S. Trifonov, R.B. Vasiliev, I.S. Ezubchenko, M.S. Sokolikova, D.R. Britov, D.E. Presnov, O.V. Snigirev

A.A. Fedotov - Research engineer, Center of Physical and Chemical Technology. E-mail: fedotov-a-a@yandex.ru
S.A. Grigoriev - Dr.Sc. (Eng.), Assotiate Professor, Center of Physical and Chemical Technology. E-mail: grig@hepti.kiae.ru
V.N. Fateev - Dr.Sc. (Chem.), Professor, Deputy Director of Center of Physical and Chemical Technology. E-mail: fat@hepti.kiae.ru

S.P. Timoshenkov - Dr. Sc. (Eng.), Professor, Head of Microelectronics Department, National Research University of Electronic Technology (MIET) (Moscow, Russia). E-mail: spt@miee.ru
D.S. Gaev - Ph.D. (Eng.), Associate Professor, Kabardino-Balkarian State University (KBSU) (Nalchik, Russia). E-mail: dahir@mail.ru
A.N. Boyko - Ph.D. (Eng.), Associate Professor, Microelectronics Department, National Research University of Electronic Technology (MIET) (Moscow, Russia). E-mail: ant_nico@mail.ru
R.R. Galiullin - Ph.D. (Eng.), Kabardino-Balkarian State University (KBSU) (Nalchik, Russia). E-mail: svd5555@mail.ru

A. A. Fedotov - Research engineer, Center of Physical and Chemical Technology. E-mail: fedotov-a-a@yandex.ru
S. A. Grigoriev - Dr.Sc. (Eng.), Assotiate Professor, Center of Physical and Chemical Technology. E-mail: grig@hepti.kiae.ru br> V. N. Fateev - Dr.Sc. (Chem.), Professor, Deputy Director of Center of Physical and Chemical Technology. E-mail: fat@hepti.kiae.ru

V.S. Polyakov - Head of Laboratory, JSC «Pluton» (Moscow), Post-graduate Student, MATI-RSUAT (Moscow). E-mail: p_vs@list.ru
A.D. Silaev - Head of Laboratory, JSC «Pluton» (Moscow), Post-graduate Student, MATI-RSUAT (Moscow). E-mail: silaev_ad@mail.ru
N.E. Ledentсova - Engineer, JSC «Pluton» (Moscow), Post-graduate Student, MIEM NRU HSE (Moscow). E-mail: nekharitonova@mail.ru
I.P. Lee - Ph. D. (Eng.), Head of Department, JSC «Pluton» (Moscow). E-mail: ork@pluton.msk.ru
А.А. Lozovan - Dr. Sc. (Eng.), Professor, Head of Department, MATI-RSUAT (Moscow). E-mail: loz-plasma@yandex.ru

S.A. Loskutov - Ph.D. (Eng.), Associate Professor, Kaluga branch of the Bauman MSTU. E-mail: loskutov@bmstu-kaluga.ru D.K. Nikiforov - Ph.D. (Phys.-Math.), Associate Professor, Kaluga branch of the Bauman MSTU. E-mail: dm_nikif@rambler.ru N.I. Pchelintseva - Ph.D. (Eng.), Associate Professor, Kaluga branch of the Bauman MSTU. E-mail: pchelintseva.n@yandex.ru M.G. Chistyakov - Student, Bauman Moscow State Technical University. E-mail: fn2kf@list.ru

D.V. Zhuravskij - Head of the Laboratory of Electronic and Probe Microscopy, SEC «Nanotechnology», Tyumen State University. E-mail: d.zhuravskij@gmail.com A.N. Bobylev - Post-graduate Student, Department of Mechanics of Multiphase Systems, Tyumen State University; Researcher, SEC «Nanotechnology», Tyumen State University. E-mail: andreaubobylev@gmail.com S.Yu. Udovichenko - Dr.Sc. (Phys.-Math.), Department of Micro and Nanotechnology, Head of SEC «Nanotechnology», Tyumen State University. E-mail: udotgu@mail.ru V.A. Filippov - Ph.D. (Sociology), Head of the Russian Center for Advanced Studies «Artificial Cognitive Systems» (Tyumen). E-mail: filippov-vadim@yandex.ru

I.K. Belova - Ph. D. (Phys.-Math.), Kaluga branch of the Bauman MSTU E.O. Deryugina - Ph. D. (Eng.), Kaluga branch of the Bauman MSTU. E-mail: bik23@yandex.ru

R.I. Batalov - Ph.D. (Phys.-Math.), Senior Research Scientist, E.K. Zavoyskii Kazan Physical-Technical Institute of RAS E-mail: batalov@kfti.knc.ru R.M. Bayazitov - Dr.Sc. (Phys.-Math.), Leading Research Scientist, E.K. Zavoyskii Kazan Physical-Technical Institute of RAS, Kazan State Power Engineering University E-mail: batalov@kfti.knc.ru I.A. Faizrakhmanov - Dr.Sc. (Phys.-Math.), Chief Research Scientist, E.K. Zavoyskii Kazan Physical-Technical Institute of RAS E-mail: batalov@kfti.knc.ru G.D. Ivlev - Ph.D. (Phys.-Math.), Senior Research Scientist, Belarussian State University, Minsk, Belarus

S.A. Bagdasaryan - Ph. D. (Eng.), General Director of JSC «Scientific Engineering Center «Technological Developments of Telecommunication and Radio Frequency Identification» (Moscow) E-mail: bagdassarian@mail.ru S.A. Nalimov - Leading Process Engineer, Central Research Technological Institute «Technomash» (Moscow) E-mail: belyanin@cnititm.ru V.V. Borisov - Leading Programmer, Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University E-mail: borvv1947@mail.ru N.I. Sushentsov - Ph. D. (Eng.), Associate Professor, Head of Department, Volga State University of Technology (Yoshkar-Ola) E-mail: sniyola@mail.ru

V.I. Gusev – General Director of LLC «MAGNITEX SPB» (Saint–Petersburg)
E-mail: magnitex1@yandex.ru
Aung Kyaw Kyaw – Post-graduate Student, Kaluga branch of the Bauman MSTU
E-mail: akkyaw.bmstu.50@gmail.com
O.Yu. Egorova – Student, Kaluga branch of the Bauman MSTU
E-mail: oksana.egorova95@yandex.ru
V.S. Zaionchkovsky – Ph.D.(Phys.-Math.), Associate Professor, Kaluga branch of the Bauman MSTU E-mail: vz48@post.ru
V.V. Paramonov – Ph.D.(Chem.), Associate Professor, Kaluga branch of the Bauman MSTU E-mail: victorparamonov@yandex.ru

A.A. Dodunov1, A.V. Lukyanenko2, S.G. Kochura3, I.A. Maksimov4, A.B. Nadiradze5, V.A. Smirnov6, R.E. Tihkomirov7

1,5 Moscow Aviation Institute (National Research University) (Moscow, Russia)
2 Kirensky L.V. Institute of Physics of Siberian Branch of the Russian Academy of Sciences (Krasnoyarsk, Russia)
3,4,6,7 Academician M.F. Reshetnev Informational Satellite Systems (Zheleznogorsk, Russia)
1 lexadudunov489@mail.ru, 2lav@iph.krasn.ru, 3kochura@iss-reshetnev.ru, 4mia@iss-reshetnev.ru, 5 nadiradze@mai.ru, 6 smirnov@iss-reshetnev.ru, 7tikhroman@iss-reshetnev.ru

A.R. Shakhmayeva1, E. Kazalieva2

1,2 Dagestan State Technical University (DSTU) (Makhachkala, Russia)
1 fpk12@mail.ru, 2 kazanova.em@mail.ru