V.P. Marin, N.A. Tomilin, V.S. Belov

V.P. Marin, N.A. Tomilin, N.V. Jarantsev, A.A.Tseluev

V. M. Achildiev, M. A. Basarab, Yu. K. Gruzevich, B. S. Lunin, V. A. Matveev, V. A. Soldatenkov

S.M. Karabanov, V.A. Korotchenko, V.I. Solovyev, Je.I. Sokolovskij, Zh.V. Solotenkova

V.Ya. Shanigin, R.K. Yafarov, S.Yu. Suzdaltsev

N.N. Balan, E.N. Ivashov, P.A. Luchnikov, A.V. Nevsky

Je.I. Sokolovskij - Ph.D. (Eng.), Associate Professor, Department Electronic Engineering and Technology, Ryazan State Radio Engineering University. E-mail: ett@rsreu.ru
V.A. Korotchenko - Dr. Sc. (Eng.), Professor, Department Electronic Engineering and Technology, Ryazan State Radio Engineering University. E-mail: ett@rsreu.ru
Zh.V. Putilina - Post-graduate Student, Department Electronic Engineering and Technology, Ryazan State Radio Engineering University. E-mail: ett@rsreu.ru

E.P. Sheshin - Dr.Sc. (Phys.-Math.), Professor, Moscow Institute of Physics and Technology. E-mail: sheshin@mail.mipt.ru
A.J. Kolodjazhnyj - Student, Moscow Institute of Physics and Technology. E-mail: kolodyazhnyj@gmail.com
G.M. Bolejko - Ph.D., Associate Professor, Moscow Institute of Physics and Technology. E-mail: bolhel@mail.ru

E.P. Sheshin - Dr.Sc. (Phys.-Math.), Professor, Moscow Institute of Physics and Technology. E-mail: sheshin@mail.mipt.ru
A.J. Kolodjazhnyj - Student, Moscow Institute of Physics and Technology. E-mail: kolodyazhnyj@gmail.com
A.L. Shornikova - Post-graduate Student, Moscow Institute of Physics and Technology. E-mail: kolodyazhnyj@gmail.com

Yu.V. Tcherkasova - Senior Lecturer, Department «General and Experimental Physics», Ryazan State Radio Engineering University. E-mail: yulka-8282@mail.ru
A.S. Ivanikov - Ph.D. (Eng.), Associate Professor, Department «General and Experimental Physics», Ryazan State Radio Engineering University

E.P. Sheshin - Dr.Sc. (Phys.-Math.), Professor, Moscow Institute of Physics and Technology. E-mail: sheshin@mail.mipt.ru A.J. Kolodjazhnyj - Student, Moscow Institute of Physics and Technology. E-mail: kolodyazhnyj@gmail.com A.L. Shornikova - Post-graduate Student, Moscow Institute of Physics and Technology. E-mail: kolodyazhnyj@gmail.com

D.V. Nefedov - Ph.D. (Eng.), Researcher, Kotelnikov IRE RAS (Saratov branch). E-mail: nefedov_dv@rambler.ru S.Yu. Suzdaltsev - Ph.D. (Eng.), Senior Researcher, Kotelnikov IRE RAS (Saratov branch) V.Ya. Shanygin - Senior Engineer, Kotelnikov IRE RAS (Saratov branch) R.K. Yafarov - Dr.Sc. (Eng.), Head of the Laboratory, Kotelnikov IRE RAS (Saratov branch)

V.I. Kapustin - Dr. Sc. (Phys.-Math.), Professor, Moscow State University of Information Technologies, Radio Engineering and Electronics. kapustin01@mail.ru A.P. Korzhavyi - Dr. Sc. (Eng.), Professor, Kaluga branch of the Bauman MSTU. E-mail: fn2kf@list.ru

D.K. Nikiforov - Ph. D. (Phys.-Math.), Associate Professor, Financial University - Kaluga Branch, Kaluga branch of the Bauman MSTU. E-mail: DKNikiforov@fa.ru

K.A. Amelicheva - Ph. D. (Eng.), Associate Professor, Kaluga branch of the Bauman MSTU. E-mail: aka2000@mail.ru A.N. Shmakov - Bachelor, JSC \"VOSHOD\"-KRLZ. E-mail: archangel SD@ya N.N. Unanian - Master, Kaluga branch of the Bauman MSTU. E-mail: n.unanyan@mail.ru L.N. Korol - Ph. D. (Eng.), Leading Process Engineer, JSC \"VOSHOD\"-KRLZ. E-mail: n.krlz@kaluga.ru

N.P. Yesaulov - Dr. Sc. (Eng.), Professor, Moscow Technological University (MIREA). E-mail: esauln2011@yandex.ru

D.V. Nefedov - Ph.D. (Eng.), Researcher, Saratov Branch of the Kotel-nikov Institute of Radio Engineering and Electronics Russian Academy of Science E-mail: nefedov_dv@rambler.ru S.Y. Suzdaltsev - Ph.D. (Eng.), Senior Research Scientist, Saratov Branch of the Kotel-nikov Institute of Radio Engineering and Electronics Russian Academy of Science V.Y. Shanygin - Senior Engineer, Saratov Branch of the Kotel-nikov Institute of Radio Engineering and Electronics Russian Academy of Science R.K. Yafarov - Dr.Sc. (Eng.), Professor, Head of the Laboratory, Saratov Branch of the Kotel-nikov Institute of Radio Engineering and Electronics Russian Academy of Science

V.Ya. Shanygin - Ph.D. (Eng.), Senior Engineer, Kotel\'nikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences (Saratov Branch) R.K. Yafarov - Dr.Sc. (Eng.), Нead of Laboratory, Kotel\'nikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences (Saratov Branch) S.Yu. Suzdaltsev - Ph.D. (Eng.), Senior Research Scientist, Kotel\'nikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences (Saratov Branch) D.V. Nefedov - Ph.D. (Eng.), Research Scientist, Kotel\'nikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences (Saratov Branch)

R.K. Yafarov – Dr. Sc. (Eng.), Professor, Saratov branch of Kotel'nikov IRE of RAS

E-mail: pirpc@yandex.ru

S.Yu. Suzdaltsev – Ph. D. (Eng.), Saratov branch of Kotel'nikov IRE of RAS

E-mail: suzdaltsevsy@rambler.ru

V.Ya. Shanygin – Saratov branch of Kotel'nikov IRE of RAS

E-mail: vitairerun@mail.ru

R.K. Yafarov – Dr.Sc.(Eng.), Professor, Head of Laboratory of Submicron Electron-Ion Technology,  Saratov Branch of Kotel’nikov IRE of RAS

E-mail: pirpc@yandex.ru

D.V. Nefedov – Ph.D.(Eng.), Research Scientist, 

Laboratory of Submicron Electron-Ion Technology, Saratov Branch of Kotel’nikov IRE of RAS E-mail: nefedov_dv@rambler.ru

V.I. Kristya – Dr.Sc.(Phys.-Math.), Professor, Kaluga branch of the Bauman MSTU

E-mail: kristya@bmstu-kaluga.ru

E.V. Vershinin – Ph.D.(Phys.-Math.), Associate Professor, Kaluga branch of the Bauman MSTU E-mail: yevgeniyv@mail.ru

Myo Thi Ha – Post-graduate Student, Kaluga branch of the Bauman MSTU E-mail: myothiha53@gmail.com

V.I. Kapustin – Dr.Sc.(Phys.-Math.), Professor, Leading Specialist, Technical Center «Basic Technologies of EVD», JSC «Pluton» (Moscow); Professor, Department of Nanoelectronics, RTU MIREA (Moscow) E-mail: kapustin@mirea.ru

I.P. Li – Ph.D.(Eng.), Director, Technical Center «Basic Technologies of EVD», JSC «Pluton» (Moscow) E-mail: i.li@pluton.msk.ru

A.V. Shumanov –  Deputy Director, Technical Center «Basic Technologies of EVD», JSC «Pluton» (Moscow) E-mail: alexeyshumanov@yandex.ru

S.O. Moskalenko – Bachelor, Process Engineer of the 1st category, Technical Center «Basic Technologies of EVD», JSC «Pluton» (Moscow)

E-mail: s.o.mockalenko@gmail.com

V.I. Kapustin – Dr.Sc.(Phys.-Math.), Professor, Leading Specialist, Technical Center «Basic Technologies of EVD»,

JSC «Pluton» (Moscow); Professor, Department of Nanoelectronics, RTU MIREA (Moscow)

E-mail: kapustin@mirea.ru

I.P. Li – Ph.D.(Eng.), Director, Technical Center «Basic Technologies of EVD», JSC «Pluton» (Moscow) E-mail: i.li@pluton.msk.ru

A.V. Shumanov –  Deputy Director, Technical Center «Basic Technologies of EVD», JSC «Pluton» (Moscow) E-mail: alexeyshumanov@yandex.ru

S.O. Moskalenko – Bachelor, Process Engineer of the 1st category, Technical Center «Basic Technologies of EVD»,

JSC «Pluton» (Moscow)

E-mail: s.o.mockalenko@gmail.com

S.S. Shaposhnikov1, A.Yu. Taikin2, E.P. Sheshin3, A.S. Bugaev4

1-4 Moscow Institute of Physics and Technology (National Research University) (Dolgoprudny, Russia)

S.S. Shaposhnikov1, A.Yu. Taikin2, E.P. Sheshin3, A.S. Bugaev4

1–4 Moscow Institute of Physics and Technology (Dolgoprudny, Russia)