D.V. Nefedov - Ph.D. (Eng.), Researcher, Saratov Branch of the Kotel-nikov Institute of Radio Engineering and Electronics Russian Academy of Science E-mail: nefedov_dv@rambler.ru S.Y. Suzdaltsev - Ph.D. (Eng.), Senior Research Scientist, Saratov Branch of the Kotel-nikov Institute of Radio Engineering and Electronics Russian Academy of Science V.Y. Shanygin - Senior Engineer, Saratov Branch of the Kotel-nikov Institute of Radio Engineering and Electronics Russian Academy of Science R.K. Yafarov - Dr.Sc. (Eng.), Professor, Head of the Laboratory, Saratov Branch of the Kotel-nikov Institute of Radio Engineering and Electronics Russian Academy of Science

The planar-butt structures on silicon are fabricated. The field emission characteristics are investigated. The considerable influence to maximum current density depend on forming of emission windows are established. Investigated structures has perspective of applying for vacuum electronics devices are integrated to semiconductor structures.