L.G. Akulov, R.V. Litovkin

M. L. Gurevich, A. V. Cheremokhin

N. V. Baryshnikov - Dr.Sc. (Eng.), Head of Department, Bauman Moscow State Technical University. E-mail: baryshnikov@bmstu.ru
Ya. V. Gladysheva - Post-graduate Student, Engineer, Bauman Moscow State Technical University. E-mail: yanagladysheva@gmail.com
D. G. Denisov - Ph.D. (Eng.), Associate Professor, Bauman Moscow State Technical University. E-mail: denisov_dg@mail.ru
I. V. Zhivotovsky - Ph.D. (Eng.), Associate Professor, Bauman Moscow State Technical University. E-mail: ivj@bmstu.ru

M.A. Ozerov - chief of laboratory in «State scientific metrology center». E-mail: ozzerovv@yandex.ru
A.V. Titarenko - Ph.D. (Eng.), chief of laboratory in «State scientific metrology center». E-mail: titandvit@gmail.com

V.G. Palchikov1, Yu.S. Samokhvalov2, D.A. Parekhin3

1-3 FSUE “All-Russian Research Institute of Physico-Technical and Radiotechnical Measurements” (Mendeleevo, Russia)

D.I. Yaminsky1, S.M.Panova2, I.V. Yaminsky3

1–3 Lomonosov Moscow State University (Moscow, Russia)
2,3 Advanced Technologies Center (Moscow, Russia)
1 y@sinno.ru, 2 serafima.panova@student.physchem.msu.ru, 3 yaminsky@nanoscopy.ru