N. V. Baryshnikov - Dr.Sc. (Eng.), Head of Department, Bauman Moscow State Technical University. E-mail: baryshnikov@bmstu.ru
Ya. V. Gladysheva - Post-graduate Student, Engineer, Bauman Moscow State Technical University. E-mail: yanagladysheva@gmail.com
D. G. Denisov - Ph.D. (Eng.), Associate Professor, Bauman Moscow State Technical University. E-mail: denisov_dg@mail.ru
I. V. Zhivotovsky - Ph.D. (Eng.), Associate Professor, Bauman Moscow State Technical University. E-mail: ivj@bmstu.ru

At the present moment problems of defining and controlling the optical surface quality parameters are a great interest. Creation of several next generation systems with peak performance challenged to manufacture large aperture optical details with principally new requirements to the parameters of the optical surface wavefront and roughness. These parameters define overall performance of technical systems. However the requirement of strengthening the optical surface profile of current optical-electronic systems dictates the developing of interferometric control methods. Present instruments should be able to give precise measurements and also take precise measurements in the presence of vibrations and motions. Key features of schemes and methods of the interferometric control of high-precision optics are presented in the paper. They are connected with the methods of estimation of the quality of the optical surfaces, problems of the vibration immunity; building of the interferometric control scheme based on the interferometer Intellium H2000 (ESDI) and developed optical collimator; estimation of the scheme errors and schemes of calibration for error correction. Solution of these problems would make possible to develop instruments for precise control of the large aperture optical surfaces.

 

1. Abdulkadyrov, M. A., Belousov, S. P., Alexandr N. Ignatov // Manufacturing of primary mirrors from Sitall CO-115M for European projects TTL, NOA and VST // Proc. of SPIE. 2009. V. 7390.
2. Abdulkady'rov M. A. i dr. Neravnoplechij IK-interferometr Tvajmana-Grina dlya kontrolya formy' i kachestva poverxnostej krupnogabaritny'x opticheskix detalej na stadii shlifovaniya // Opticheskij zhurnal. 2010. № 1.
3. Mezhdunarodny'j standart 10110 - 1. Optika i opticheskie pribory'. Pravila oformleniya chertezhej opticheskix e'lementov i sistem. 1996.
4. Beckmann, P., Spizzichino, A., The Scattering of Electromagnetic Waves from Rough Surface. Norwood: Pergamon Press, ARTECH HOUSE. 1987.
5. Intellium - H2000 Overview // http://esdimetrology.com/p/fizeau/intellium_h2000.html
6. Bary'shnikov N. V., Glady'sheva Ja. V., Denisov D. G., Zhivotovskij I. V., Patrikeev V. E., Sudarikov I. N. Issledovanie interferenczionny'x metodov kontrolya formy' i kachestva vy'sokotochny'x poverxnostej krupnogabaritny'x opticheskix detalej // Vestnik MGTU im. N. E'. Baumana. Ser. Priborostroenie. Specz vy'pusk. Sovremenny'e problemy' optotexniki. 2012.
7. Chiayu Ai, Wyant, J. S., Absolute testing of flats by using even and odd functions. Applied optics, 1993. V. 32, 25.