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ДЕТЕКТИРОВАНИЕ МИЛЛИМЕТРОВОГО ИЗЛУЧЕНИЯ НА МОДИФИЦИРОВАННЫХ ТОНКИХ ПЛЁНКАХ V, ВЫРАЩЕННЫХ В ПОТОКАХ НИЗКОТЕМПЕРАТУРНОЙ ПЛАЗМЫ
В. А. АЛЕКСАНДРОВ, А. А. СЕРДОБИНЦЕВ, А. Г. ВЕСЕЛОВ Саратовский филиал института радиотехники и электроники им. В. А. Котельникова РАН E-mail: AlexandrovVA@gmail.com, SerdobintsevAA@info.sgu.ru, VeselovaLP @info.sgu.ru
Perfection of the construction of the magnetron reactor for etching of materials in low-temperature plasma
S.B. Benevolenskiy, E.V. Zhalnova, V.I. Kubrin, E.V. Marsova
Electrophysical properties of the planar gas-discharge plasma limited by dielectric walls
A.S. Bankovsky - Ph. D. (Phys.-Math.), Associate Professor, Department «Electronic devises and equipment», Yuri Gagarin State Technical University (Saratov) A.A. Zakharov - Dr. Sc. (Eng.), Professor, Department «Electronic devises and equipment», Yuri Gagarin State Technical University (Saratov). E-mail: zaharov@sstu.ru A.A. Ivanova - Student, Department «Electronic devises and equipment», Yuri Gagarin State Technical University (Saratov). E-mail: anastasia.acia@gmail.com
Distribution of space charge in a magnetized gas-discharge plasma bounded by plane dielectric walls

A.S. Bankovskiy – Ph.D.(Phys.-Math.), Associate Professor, Department «Electronic Instruments and Devices», Yuri Gagarin State Technical University of Saratov

A.A. Zakharov – Dr.Sc.(Eng.), Professor, Head of Department «Electronic Instruments and Devices», Yuri Gagarin State Technical University of Saratov

E-mail: zaharov@sstu.ru

A.A. Potapov – Undergraduate, Department «Electronic Instruments and Devices», Yuri Gagarin State Technical University of Saratov

E-mail: potapov_andrey13@mail.ru

Energy properties of the flat gas-discharge plasma that inhomogeneous along the current line

A.A. Zakharov – Dr.Sc.(Eng.), Professor, 

Department «Electronic devices and systems engineering», Yuri Gagarin State Technical University of Saratov E-mail: zaharov@sstu.ru

A.S. Bankovsky – Ph.D.(Phys.-Math.), Associate Professor, 

Department «Electronic devices and systems engineering», Yuri Gagarin State Technical University of Saratov

A.A. Abrosimov – Master Student,  

Department «Electronic devices and systems engineering», Yuri Gagarin State Technical University of Saratov

E-mail: sjkm0667@gmail.com

Influence of the spatial charge in a gas-discharge plasma on the stability of the particle balance and the current component of the electric field strength

A.S. Bankovsky – Ph.D. (Phys.-Math.), Associate Professor, 

Department of Electronic Devices, Yuri Gagarin State Technical University of Saratov E-mail: alexm@sstu.ru

A.A. Zakharov – Dr.Sc. (Eng.), Professor, 

Department of Electronic Devices, Yuri Gagarin State Technical University of Saratov E-mail: zaharov@sstu.ru

A.A. Potapov – Postgraduate Student, 

Department of Electronic Devices, Yuri Gagarin State Technical University of Saratov

E-mail: potapov_andrey13@mail.ru

A.A. Shvachko – Ph.D. (Eng.), Associate Professor, 

Department of Electronic Devices, Yuri Gagarin State Technical University of Saratov Email: alexandr1899@gmail.com