O.I. Belozerov, Derhim Ali Kabus Kassim, V.A. Aleksenko

O.A. Ryabushkin - Ph.D. (Phys.-Math.), Associate Professor, Moscow Institute of Physics and Technology, Institute of Radio-engineering and Electronics of RAS Fryazino branch. E-mail: roa228@mail.ru
R.I. Shaidullin - Research Scientist, Moscow Institute of Physics and Technology, Institute of Radio-engineering and Electronics of RAS Fryazino branch. E-mail: rs-mipt@mail.ru
I.A. Zaytsev - Research Scientist, Institute of Radio-engineering and Electronics of RAS Fryazino branch. E-mail: hetziff@mail.ru

F.S. Fedorov - Ph.D. (Eng.), Research Scientist, Saratov branch of Kotelnikov IRE RAS. E-mail: fyodorchem@yandex.ru A.S. Varezhnikov - Post-graduate Student, Yuri Gagarin State Technical University of Saratov V.V. Kolesnichenko - Master Student, Yuri Gagarin State Technical University of Saratov I.N. Burmistrov - Ph.D. (Chem.), Senior Research Scientist, Yuri Gagarin State Technical University of Saratov A.V. Gorokhovsky - Dr.Sc. (Chem.), Professor, Yuri Gagarin State Technical University of Saratov V.V. Sysoev - Dr.Sc. (Phys.-Math.), Professor, Yuri Gagarin State Technical University of Saratov

E.A. Bychkov – Post-graduate Student, Department “Medical and Technical Information Technologiy” (BMT-2), Bauman Moscow State Technical University

E-mail: ipbychkov.e.a@yandex.ru

I.A. Kudashov – Ph.D. (Eng.), Associate Professor, Department “Medical and Technical Information Technologiy” (BMT-2), Bauman Moscow State Technical University

E-mail: KydashovV@mail.ru

S.I. Shchukin – Dr.Sc. (Eng.), Professor, Head of Department “Medical and Technical Information Technologiy” (BMT-2), Bauman Moscow State Technical University

E-mail: schookin@mx.bmstu.ru

S.B. Simakin – Dr.Sc. (Eng.), Head of Department, S.A. Vekshinsky Scientific Research Institute of Vacuum Technology

E-mail: plasma@iontecs.ru

E.A. Mitrofanov –Ph.D. (Eng.), Head of Laboratory, S.A. Vekshinsky Scientific Research Institute of Vacuum Technology

E-mail:plasma@iontecs.ru

A.A. Satanenko1, I.A. Kudashov2, A.P. Nikolaev3

1–3 Bauman Moscow State Technical University (Moscow, Russia)

1 arti1286@yandex.ru, 2 KydashovV@mail.ru, 3 apnikolaev@yandex.ru