Journals
Books
Articles by keyword beam-plasma discharge
Single layer natural graphite etching conditions optimization in plasma processing reactor based on beam-plasma discharge
V.V. Peskov, Yu.I. Latyshev, E.G. Shustin
Studying of characteristics of diamond-like films produced by plasma-chemical reactor based on beam-plasma discharge
I.L. Klykov, A.A. Khomich, E.G. Shustin