350 rub
Journal Nonlinear World №1 for 2011 г.
Article in number:
Studying of characteristics of diamond-like films produced by plasma-chemical reactor based on beam-plasma discharge
Keywords:
young scientist
work contest
IRE RAS
plasma technology
beam-plasma discharge
diamond-like films
plasma-chemical reactor
Authors:
I.L. Klykov, A.A. Khomich, E.G. Shustin
Abstract:
Optimization of operating conditions of plasma reactor using a specific modulator has been made. A set of samples at different deposition conditions has been obtained. The characteristics of diamond films deposited on various substrates
Pages: 7-8
References
- Исаев Н.В., Клыков И.Л., Песков В.В., Шустин Е.Г. Пучково-плазменный реактор в режиме осаждения алмазоподобных пленок // XXXVII Междунар. (Звенигородская) конф. по физике плазмы и УТС. 2010