V. M. Achildiev, M. A. Basarab, Yu. K. Gruzevich, B. S. Lunin, V. A. Matveev, V. A. Soldatenkov

S.M. Karabanov, V.A. Korotchenko, V.I. Solovyev, Je.I. Sokolovskij, Zh.V. Solotenkova

V.Ya. Shanigin, R.K. Yafarov, S.Yu. Suzdaltsev

Je.I. Sokolovskij - Ph.D. (Eng.), Associate Professor, Department Electronic Engineering and Technology, Ryazan State Radio Engineering University. E-mail: ett@rsreu.ru
V.A. Korotchenko - Dr. Sc. (Eng.), Professor, Department Electronic Engineering and Technology, Ryazan State Radio Engineering University. E-mail: ett@rsreu.ru
Zh.V. Putilina - Post-graduate Student, Department Electronic Engineering and Technology, Ryazan State Radio Engineering University. E-mail: ett@rsreu.ru

E.P. Sheshin - Dr.Sc. (Phys.-Math.), Professor, Moscow Institute of Physics and Technology. E-mail: sheshin@mail.mipt.ru
A.J. Kolodjazhnyj - Student, Moscow Institute of Physics and Technology. E-mail: kolodyazhnyj@gmail.com
G.M. Bolejko - Ph.D., Associate Professor, Moscow Institute of Physics and Technology. E-mail: bolhel@mail.ru

E.P. Sheshin - Dr.Sc. (Phys.-Math.), Professor, Moscow Institute of Physics and Technology. E-mail: sheshin@mail.mipt.ru
A.J. Kolodjazhnyj - Student, Moscow Institute of Physics and Technology. E-mail: kolodyazhnyj@gmail.com
A.L. Shornikova - Post-graduate Student, Moscow Institute of Physics and Technology. E-mail: kolodyazhnyj@gmail.com

Yu.V. Tcherkasova - Senior Lecturer, Department «General and Experimental Physics», Ryazan State Radio Engineering University. E-mail: yulka-8282@mail.ru
A.S. Ivanikov - Ph.D. (Eng.), Associate Professor, Department «General and Experimental Physics», Ryazan State Radio Engineering University

E.P. Sheshin - Dr.Sc. (Phys.-Math.), Professor, Moscow Institute of Physics and Technology. E-mail: sheshin@mail.mipt.ru A.J. Kolodjazhnyj - Student, Moscow Institute of Physics and Technology. E-mail: kolodyazhnyj@gmail.com A.L. Shornikova - Post-graduate Student, Moscow Institute of Physics and Technology. E-mail: kolodyazhnyj@gmail.com

D.V. Nefedov - Ph.D. (Eng.), Researcher, Kotelnikov IRE RAS (Saratov branch). E-mail: nefedov_dv@rambler.ru S.Yu. Suzdaltsev - Ph.D. (Eng.), Senior Researcher, Kotelnikov IRE RAS (Saratov branch) V.Ya. Shanygin - Senior Engineer, Kotelnikov IRE RAS (Saratov branch) R.K. Yafarov - Dr.Sc. (Eng.), Head of the Laboratory, Kotelnikov IRE RAS (Saratov branch)

D.V. Nefedov - Ph.D. (Eng.), Researcher, Saratov Branch of the Kotel-nikov Institute of Radio Engineering and Electronics Russian Academy of Science E-mail: nefedov_dv@rambler.ru S.Y. Suzdaltsev - Ph.D. (Eng.), Senior Research Scientist, Saratov Branch of the Kotel-nikov Institute of Radio Engineering and Electronics Russian Academy of Science V.Y. Shanygin - Senior Engineer, Saratov Branch of the Kotel-nikov Institute of Radio Engineering and Electronics Russian Academy of Science R.K. Yafarov - Dr.Sc. (Eng.), Professor, Head of the Laboratory, Saratov Branch of the Kotel-nikov Institute of Radio Engineering and Electronics Russian Academy of Science

V.Ya. Shanygin - Ph.D. (Eng.), Senior Engineer, Kotel\'nikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences (Saratov Branch) R.K. Yafarov - Dr.Sc. (Eng.), Нead of Laboratory, Kotel\'nikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences (Saratov Branch) S.Yu. Suzdaltsev - Ph.D. (Eng.), Senior Research Scientist, Kotel\'nikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences (Saratov Branch) D.V. Nefedov - Ph.D. (Eng.), Research Scientist, Kotel\'nikov Institute of Radio Engineering and Electronics of the Russian Academy of Sciences (Saratov Branch)

R.K. Yafarov – Dr. Sc. (Eng.), Professor, Saratov branch of Kotel'nikov IRE of RAS

E-mail: pirpc@yandex.ru

S.Yu. Suzdaltsev – Ph. D. (Eng.), Saratov branch of Kotel'nikov IRE of RAS

E-mail: suzdaltsevsy@rambler.ru

V.Ya. Shanygin – Saratov branch of Kotel'nikov IRE of RAS

E-mail: vitairerun@mail.ru

R.K. Yafarov – Dr.Sc.(Eng.), Professor, Head of Laboratory of Submicron Electron-Ion Technology,  Saratov Branch of Kotel’nikov IRE of RAS

E-mail: pirpc@yandex.ru

D.V. Nefedov – Ph.D.(Eng.), Research Scientist, 

Laboratory of Submicron Electron-Ion Technology, Saratov Branch of Kotel’nikov IRE of RAS E-mail: nefedov_dv@rambler.ru

S.S. Shaposhnikov1, A.Yu. Taikin2, E.P. Sheshin3, A.S. Bugaev4

1-4 Moscow Institute of Physics and Technology (National Research University) (Dolgoprudny, Russia)

S.S. Shaposhnikov1, A.Yu. Taikin2, E.P. Sheshin3, A.S. Bugaev4

1–4 Moscow Institute of Physics and Technology (Dolgoprudny, Russia)