Journals
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Articles by keyword scanning electron microscope
Investigation of Cubic Boron Nitride Using the Colour Cathodoluminescence (CCL) and High Resolution Spectral Analysis in a Scanning Electron Microscope
O.R. Abdullaev - Ph.D. (Eng.), Vice-Director on R&D, Place of employment: JSC «Optron». E-mail: abd@optron.ru
A.I. Gabelchenko - Member of Chair of Physics and Electronics, Faculty for Physics, Lomonosov Moscow State University
P.V. Ivannikov - Member of Chair of Physics and Electronics, Faculty for Physics, Lomonosov Moscow State University
A.S. Yakunin - Director of Department for RF electronics production, Сhamber of Commerce and Industry of the Russian Federation
Method for determining the scan nonlinearity of scanning electron microscopes
V.B. Mityuhlyaev - Ph. D. (Phys.-Math.), Head of Department, АО «NICPV» (Moscow) E-mail: fgupnicpv@mail.ru S.S. Antsyferov - Dr. Sc. (Eng.), Professor, Moscow Technological University (MIREA) E-mail: c_standard@fel.mirea.ru V.G. Maslov - Post-graduate Student, Moscow Technological University (MIREA); Engineer, АО «NICPV» (Moscow) E-mail: monty-49@mail.ru