B. G. Mayorov - Ph.D. (Eng.), Associate Professor, Leading Research Scientist, JSC «SIE «Rubin». E-mail: mail@npp-rubin.ru

M.S. Ashapkina - Post-graduate Student, Department of Micro- and Nanoelectronics, Ryazan State Radio Engineering University. E-mail: mary62@mail.ru A.V. Alpatov - Ph.D. (Eng.), Associate Professor, Department of Micro- and Nanoelectronics, Ryazan State Radio Engineering University. E-mail: alpatov-alexey@yandex.ru A.A. Chekushin - Ph.D. (Med.), Assistant, Department of General Surgery, Ryazan State Medical University named after academician I.P. Pavlov. E-mail: rmi-62@rambler.ru

M.V. Nikitin1, S.G. Zybtsev2, V.Ya. Pokrovskii3, B.A. Loginov4

1−3 Kotel’nikov Institute of Radioengineering and Electronics of RAS (Moscow, Russia)

4 NRU MIET (Zelenograd, Russia)