Journals
Books
Articles by keyword silicon substrate
Physical Singularities of Graphene Interconnects for Nanotransistors VLSI
V. A. Goryachev
Analysis of the low-resistance contact of the system titanium-nickel with strongly doped silicon of N type
A.V. Skiper - Senior Lecturer, Kaluga branch of the Bauman MSTU. E-mail: skiper60@yandex.ru N.S. Lazarev - Student, Kaluga branch of the Bauman MSTU. E-mail: lazarevnikolay05@gmail.com V.S. Zaionchkovskiy - Ph. D. (Phys.-Math.), Associate Professor, Kaluga branch of the Bauman MSTU. E-mail: vz48@post.ru I.A. Rastorguyev - Student, Kaluga branch of the Bauman MSTU. E-mail: rastorguew94@gmail.com
Preparation of the substrate surface of silicon nanowire field-effect transistors to create a biosensor

A.A. Cheremiskina¹, V.M. Generalov², A.S. Safatov³, G.A. Buryak4, A.L. Aseev5

1–4 Federal State Research Institution State Research Center of Virology and Biotechnology «Vector» Rospotrebnadzor     (Koltsovo, Novosibirsk Region, Russia)

5 Institute of Semiconductor Physics named after A.V. Rzhanov, Siberian Branch of the Russian Academy of Sciences

Novosibirsk State University (Novosibirsk, Russia)