Журнал «Радиотехника» | Издательство РАДИОТЕХНИКА

A.A. Valueva – Junior Research Scientist, Institute of Biomedical Chemistry (Moscow); D. Mendeleev University of Chemical Technology of Russia (Moscow)

E-mail: varuevavarueva@gmail.com

R.A. Galiullin – Lead Programmer, Institute of Biomedical Chemistry (Moscow)

E-mail: rafael.anvarovich@gmail.com

V.S. Ziborov – Leading Specialist, Institute of Biomedical Chemistry (Moscow); Joint Institute for High Temperatures of the RAS (Moscow)

E-mail: ziborov.vs@yandex.ru

O.F. Petrov – Academician of the RAS, Dr.Sc. (Phys.-Math.), Director of the Institute,

Joint Institute for High Temperatures of the RAS (Moscow)

E-mail: ofpetrov@ihed.ras.ru

V.G. Nikitaev – Dr.Sc. (Eng.), Professor, Head of the Department of computer medical system, National Research Nuclear University «MEPhI» (Moscow)

E-mail: kaf46@mail.ru

A.N. Pronichev – Ph.D. (Eng.), First Deputy Head of the Department of Computer Medical Systems, National Research Nuclear University «MEPhI» (Moscow)

E-mail: kaf46@mail.ru

E.A. Druzhinina – Post-graduate Student, National Research Nuclear University «MEPhI» (Moscow)

E-mail: kaf46@mail.ru

Yu.D. Ivanov – Dr.Sc. (Biol.), Professor, Head of the Nanobiotechnology Laboratory,

Institute of Biomedical Chemistry (Moscow)

E-mail: yurii.ivanov.nata@gmail.com

Preparation of the substrate surface of silicon nanowire field-effect transistors to create a biosensor

A.A. Cheremiskina¹, V.M. Generalov², A.S. Safatov³, G.A. Buryak4, A.L. Aseev5

1–4 Federal State Research Institution State Research Center of Virology and Biotechnology «Vector» Rospotrebnadzor (Koltsovo, Novosibirsk Region, Russia)

5 Institute of Semiconductor Physics named after A.V. Rzhanov, Siberian Branch of the Russian Academy of Sciences

Novosibirsk State University (Novosibirsk, Russia)