A.V. Dunaev, E.A. Zherebtsov, D.A. Rogatkin

M.D. Ershov

A.A. Vorozheikin - Leading Engineer, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: alevor@mail.ru I.A. Guzilov - Ph. D. (Eng.), Main Designer, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: iag@bk.ru E.V. Demidov - Ph. D. (Econ.), General Director, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: 2101-80@mail.ru A.A. Kornyukhin - Leading Engineer, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: iag@bk.ru A.V. Krasikov - Senior Engineer, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: san1315@mail.ru A.V. Krylov - Head of Department, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: iag@bk.ru O.U. Maslennikov - Dr. Sc. (Eng.), Professor, Deputy General Director, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: maslennikov_o@mail.ru M.A. Tokaev - Assistant Director, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: btvp81@mail.ru

A.V. Belousov - Ph.D. (Phys.-Math.), Associate Professor, Faculty of Physics, Lomonosov Moscow State University E-mail: belousovav@physics.msu.ru A.A.Belianov - Junior Research Scientist, Faculty of Physics, Lomonosov Moscow State University G.A.Krusanov - Post-graduate Student, Faculty of Physics, Lomonosov Moscow State University E-mail: krusa-nov@physics.msu.ru A.P. Chernyaev - Dr.Sc. (Phys.-Math.), Professor, Head of Department, Faculty of Physics, Lomonosov Moscow State University

S.V. Frolov1, A.A. Korobov2, K.S. Savinova3, A.Yu. Potlov4, T.A. Frolova5

1–5 Tambov State Technical University (Tambov, Russia)
1 sergej.frolov@gmail.com, 2 korobov1991@mail.ru, 3 savinova.k94@mail.ru, 4 zerner@yandex.ru, 5 frolova2000@gmail.com