Journals
Books
Articles by keyword mechanical stresses
Influence of process conditions of magnetron sputtering on the mechanical stresses and surface roughness of molybdenum films
V.N. Zima - Ph.D. (Eng.), Leading Research Scientist, PJSC «ONIIP». E-mail: info@oniip.ru
T.N. Tanskaya - Junior Research Scientist, PJSC «ONIIP». E-mail: info@oniip.ru
Influence of dislocations on parametrical properties of semiconductor instruments
I.R. Berezhanskiy - Student, Kaluga branch, Bauman MSTU E-mail: berezhanskiy.ivan@mail.ru S.A. Adarchin - Ph.D. (Eng.), Associate Professor, Deputy Head of Department, Kaluga branch, Bauman MSTU E-mail: adarchin@rambler.ru V.G. Kosushkin - Dr. Sci. (Eng.), Professor, Head of Department, Kaluga branch, Bauman MSTU E-mail: kosushkin@gmail.com