Journals
Books
Articles by keyword X-ray spectroscopy
Failure analysis of electronic components аnd integrated circuits
V.A. Smetannikow
On the possibility of indirect measurement of the thin carbon films Thickness using energy-dispersive analysis

I.A. Sorokin1, D.V. Kolodko2

1,2 Fryazino branch of Kotelnikov IRE of RAS (Fryazino, Russia)

1,2 National Research Nuclear University Moscow Engineering Physics Institute (Moscow, Russia)