I.A. Sorokin1, D.V. Kolodko2

1,2 Fryazino branch of Kotelnikov IRE of RAS (Fryazino, Russia)

1,2 National Research Nuclear University Moscow Engineering Physics Institute (Moscow, Russia)

Problem formulating. Measuring the thickness of some functional and decorative coatings requires the use of non-contact non-destructive control methods. It is relevant for the processes of precious metals deposition [1-2]; for intermediate stages of creating micro- and nanoelectronics; when the use of contact methods can partially or entirely destroy the coating. The application of contact methods in measuring the thickness of thin (< 100 nm) carbon functional films (nanocrystalline graphite, diamond-like films, or multilayer graphene) meets specific difficulties, mainly due to high stresses in the crystal structure of the films. In this case, any local damage of the crystal structure can lead to complete destruction of the coating.

Goal. Expanding the functionality of the existing contactless EDS technique for indirect measurement of the thin coatings thickness (EPMA) into the light elements: carbon functional coatings, lithium, beryllium films, etc.

Result. The theoretical basis of a new non-contact method for measuring the thickness of light elements films (carbon, beryllium, lithium, etc.) using energy-dispersive spectroscopy has been developed.

Practical meaning. The proposed technique will make it possible to measure, for example, thin (<100 nm) functional carbon coatings (nanocrystalline graphite, diamond-like films, multilayer graphene, etc.) with high stresses in the crystal structure.

Sorokin I.A., Kolodko D.V. On the possibility of indirect measurement of the thin carbon films thickness using energy-dispersive analysis. Nonlinear World. 2022. V. 20. № 2. P. 32-37. DOI: https://doi.org/10.18127/j20700970-202202-07
(In Russian)

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