Journals
Books
Articles by keyword литография
Estimation of Proximity Effect For Creation Nanoscale Bioactive Structures When the Charge is Injected into Thin Films of Polymethylmethacrylate
A.S. Sitnikov, V.A. Smolar
Ionic-Implantation Processing of Metal Layers in the Technology of Microwave Micro-Devices
I. V. Perinskaya
Estimation of Proximity Effect For Creation Nanoscale Bioactive Structures When the Charge is Injected into Thin Films of Polymethylmethacrylate
A.S. Sitnikov, V.A. Smolar
Ion-beam lithography in semiconductor technology of microwave microelectronics
V.V. Perinsky, V.N. Lyasnikov
Integrated expert system for diagnosis of billet quality for electron-beam lithography
G.V. Rybina, Yu.M. Blokhin, G.S. Gokhberg, A.S. Rudyi
Modeling ultraviolet lithography processes immersion stage design advances
N.N. Balan, V.A. Vasin, E.N. Ivashov, P.S. Kostomarov, S.V. Stepanchikov
Photomasks design features for nanosized semiconductor VLSI
A.V. Kornyukhin, S.A. Kurdyukov, A.N. Lantsev, P.A. Luchnikov, M.V. Starilov
Modeling ultraviolet lithography processes immersion stage design advances
N.N. Balan, V.A. Vasin, E.N. Ivashov, P.S. Kostomarov, S.V. Stepanchikov
Planar structures of nano-voids in volume of a crystal

E.A. Stepantsov – Ph.D. (Phys.-Math.), Leader Research Scientist, 

Institute of Crystallography n.a. A.V. Shubnikov, FSIC Crystallography and Photonics of RAS (Moscow)

E-mail: stepantsov@ns.crys.ras.ru

Patterned magnetic recording media.

V.G. Shadrov – Ph.D. (Phys.-Math.), Leading Research Scientist, Scientific-Practical Materials Research Centre
A.E. Dmitrieva – Junior Research Scientist, Scientific-Practical Materials Research Centre
A.V. Boltushkin – Ph.D. (Phys.-Math.), Leading Research Scientist, Scientific-Practical Materials Research Centre
E-mail: nemtsevich@ifttp.bas-net.by

Patterned magnetic recording media

V.G. Shadrov – Ph.D. (Phys.-Math.), Leading Research Scientist, Scientific-Practical Materials Research Centre

A.E. Dmitrieva – Junior Research Scientist, Scientific-Practical Materials Research Centre

A.V. Boltushkin – Ph.D. (Phys.-Math.), Leading Research Scientist, Scientific-Practical Materials Research Centre E-mail: nemtsevich@ifttp.bas-net.by

Planar structures of nano-voids in volume of a crystal

E.A. Stepantsov – Ph.D. (Phys.-Math.), Leader Research Scientist, 

Institute of Crystallography n.a. A.V. Shubnikov, FSIC Crystallography and Photonics of RAS (Moscow, Russia)