A.S. Sitnikov, V.A. Smolar

Steering electron gun parameters, it is possible to obtain particular distribution of the injected charge in polyme-thylmethacrylate thin films and to create topology of the charged areas for obtaining of biologically active stuffs. For practical usage of such method it is necessary to calculate resolving ability, i.e. such minimum possible spacing interval at which two adjacent charged areas will be separatable. For calculation of the proximity effect in this work when the charge injected in polymethylmethacrylate thin films it was bringed the analytical model of a transport kinetic equation of the electrons, integrating small-angle and diffusive approximation of initial Boltzmann equation, which one is divided into two bounding themselves equations. It is important to note, that this model does not contain experimental fit parameters. As a result of computer simulation it was received topologies of the charged areas when the charge was injected in thin films of polymethylmethacrylate. From the obtained plots it is possible to set a relation between resolving ability and the energy of initial beam, to set a relation between electron penetration depth and the energy of initial beam and to set an influence of a substructure on a process of lithography.