V.I. Kapustin – Dr.Sc.(Phys.-Math.), Professor, Leading Specialist, Technical Center «Basic Technologies of EVD», JSC «Pluton» (Moscow); Professor, Department of Nanoelectronics, RTU MIREA (Moscow) E-mail: kapustin@mirea.ru

I.P. Li – Ph.D.(Eng.), Director, Technical Center «Basic Technologies of EVD», JSC «Pluton» (Moscow) E-mail: i.li@pluton.msk.ru

A.V. Shumanov –  Deputy Director, Technical Center «Basic Technologies of EVD», JSC «Pluton» (Moscow) E-mail: alexeyshumanov@yandex.ru

S.O. Moskalenko – Bachelor, Process Engineer of the 1st category, Technical Center «Basic Technologies of EVD», JSC «Pluton» (Moscow)

E-mail: s.o.mockalenko@gmail.com