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Articles by keyword tcad моделирование
Modeling of technological process of formation of high-speed diodes

V.V. Andreev – Dr. Sc. (Eng.), Professor, Department «Design and manufacturing of electronic equipment», Kaluga branch of the Bauman MSTU E-mail: vladimir_andreev@bmstu.ru

S.V. Ryzhov – Master, Department «Design and manufacturing of electronic equipment», Kaluga branch of the Bauman MSTU

E-mail: sergey.righov@gmail.com

A.V. Romanov – Post-graduate Student, Department «Design and manufacturing of electronic equipment», Kaluga branch of the Bauman MSTU E-mail: romanov@okbmel.ru

Vertical CMOS nanotransistors with a conical channel for three-dimensional integrated circuits

Н.В. Masalsky1

1 Federal State Institution "Scientific Research Institute for System Analysis of RAS" (Moscow, Russia)