Journals
Books
Articles by keyword plasma-chemical etching
Application of Plasma-Chemical Etching for pin Diode Technology
O.R. Abdullaev - Pd. Sc. (Eng.), Director of Science and Production, JSC «Optron». E-mail: abd@optron.ru
E.S. Rogovskiy - Senior Engineer, JSC «Optron». E-mail: skb-optron@mail.ru
M.Yu. Filatov - Ph.D. (Eng.), Vice-Director of Design Department, JSC «Optron». E-mail: skb-optron@mail.ru
Plasma-chemical etching of quartz glass by sulfur hexafluoride

G.R. Sagatelyan1, K.N. Bugorkov2, A.B. Solomashenko3, A.S. Kuznetsov4

1–4 Bauman Moscow State Technical University (National Research University) (Moscow, Russia)