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Articles by keyword magnetron deposition
Influence of process conditions of magnetron sputtering on the mechanical stresses and surface roughness of molybdenum films
V.N. Zima - Ph.D. (Eng.), Leading Research Scientist, PJSC «ONIIP». E-mail: info@oniip.ru
T.N. Tanskaya - Junior Research Scientist, PJSC «ONIIP». E-mail: info@oniip.ru
The use of back skattering electron diffraction for nanophase analysis of thin Pb(Zr,Ti)O<sub>3</sub> films
D.M. Dolginzev - Research Engineer, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: thphys@herzen.spb.ru A.G. Kanareikin - Post-Graduate Student, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: thphys@herzen.spb.ru V.P. Pronin - Dr.Sc. (Phys.-Math.), Professor, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: thphys@herzen.spb.ru E.Yu. Kaptelov - Dr.Sc. (Phys.-Math.), Senior Research Scientist, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: Kaptelov@mail.ioffe.ru S.V. Senkevich - Dr.Sc. (Phys.-Math.), Research Scientist, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: SenkevichSV@mail.ioffe.ru I.P. Pronin - Dr.Sc. (Phys.-Math.), Senior Research Scientist, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: Petrovich@mail.ioffe.ru