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Articles by keyword magnetron deposition
Influence of process conditions of magnetron sputtering on the mechanical stresses and surface roughness of molybdenum films
V.N. Zima - Ph.D. (Eng.), Leading Research Scientist, PJSC «ONIIP». E-mail: info@oniip.ru
T.N. Tanskaya - Junior Research Scientist, PJSC «ONIIP». E-mail: info@oniip.ru
The use of back skattering electron diffraction for nanophase analysis of thin Pb(Zr,Ti)O<sub>3</sub> films
D.M. Dolginzev - Research Engineer, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: thphys@herzen.spb.ru A.G. Kanareikin - Post-Graduate Student, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: thphys@herzen.spb.ru V.P. Pronin - Dr.Sc. (Phys.-Math.), Professor, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: thphys@herzen.spb.ru E.Yu. Kaptelov - Dr.Sc. (Phys.-Math.), Senior Research Scientist, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: Kaptelov@mail.ioffe.ru S.V. Senkevich - Dr.Sc. (Phys.-Math.), Research Scientist, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: SenkevichSV@mail.ioffe.ru I.P. Pronin - Dr.Sc. (Phys.-Math.), Senior Research Scientist, Russian State Pedagogical University. A. I. Herzen (St. Petersburg). Е-mail: Petrovich@mail.ioffe.ru
Stoichiometry of ZnO polycrystalline layers. Localization of vacancies

A.Kh. Abduyev1, A.Sh. Asvarov2, A.K. Akhmedov3, S.V. Agasiev4, V.V. Belyaev5, D.V. Generalov6, D.V. Nikolaeva7, V.V. Saenko8, E.A. Smetanin9, A.V. Koroleva10, V.V. Fedorova11

1, 4, 510, 11 Peoples' Friendship University of Russia n. a. Patrice Lumumba (Moscow, Russia)
1, 5 State University of Education (Moscow, Russia)
2, 3 Institute of Physics, Dagestan Federal Research Center of the Russian Academy of Sciences (Makhachkala, Russia)
1 abduev_akh@rudn.university, 2 abil-as@list.ru, 3 cht-if-ran@mail.ru, 4 agasieva-sv@rudn.ru, 5 belyaev-vv@rudn.ru, 6 1042200024@rudn.ru, 7 1042200022@rudn.ru, 8 vvsaenko@mail.ru, 9 tujh98@mail.ru, 10 1032201522@rudn.ru