M.M. Gourary - Ph.D. (Eng.), Senior Research Scientist, Institute for Design Problems in Microelectronics of Russian Academy of Sciences (Moscow). E-mail: gourary@ippm.ru M.M. Zharov - Ph.D. (Eng.), leading Research Scientist, Institute for Design Problems in Microelectronics of Russian Academy of Sciences (Moscow). E-mail: zarov@ippm.ru S.G. Rusakov - Dr.Sc. (Eng.), Corresponding Member of RAS, Chief Research Scientist, Institute for Design Problems in Microelectronics of Russian Academy of Sciences (Moscow). E-mail: rusakov@ippm.ru S.L. Ulyanov - Dr.Sc. (Eng.), Head of Department, Institute for Design Problems in Microelectronics of Russian Academy of Sciences (Moscow). E-mail: ulyas@ippm.ru