A.A. Vorozheikin - Leading Engineer, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: alevor@mail.ru I.A. Guzilov - Ph. D. (Eng.), Main Designer, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: iag@bk.ru E.V. Demidov - Ph. D. (Econ.), General Director, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: 2101-80@mail.ru A.A. Kornyukhin - Leading Engineer, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: iag@bk.ru A.V. Krasikov - Senior Engineer, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: san1315@mail.ru A.V. Krylov - Head of Department, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: iag@bk.ru O.U. Maslennikov - Dr. Sc. (Eng.), Professor, Deputy General Director, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: maslennikov_o@mail.ru M.A. Tokaev - Assistant Director, «Vacuum devices basic technologies» Ltd (Moscow). E-mail: btvp81@mail.ru

E.P. Sheshin1, A.A. Alyabyev2, A.D. Kibirsky3, D.M. Fun4

1-4 Moscow Institute of Physics and Technology (National Research University) (Moscow, Russia)

1sheshin.ep@mipt.ru; 2aliabev.aa@phystech.edu; 3andrejkibirskij@gmail.com; 4phungducmanh@phystech.edu