Journals
Books
Articles by keyword Microsystems engineering
The quality test of dielectric layers of integrated circuits and products of microsystem engineering
V.V. Andreev, А.А. Stolyarov, D.S. Vasjutin, A.M. Mikhal'kov
The Quality Test of Dielectric Layers of Integrated Circuits and Products of Microsystem Engineering
V.V. Andreev, А.А. Stolyarov, D.S. Vasjutin, A.M. Mikhal'kov
The analysis of measuring methods the mechanical properties of silicon in space electronics

P.S. Kuznetsov1, A.O. Sinelnikov2, E.J. Gutierrez Benavides3

1 JSC «GOSNIIP» (Moscow, Russia)
2, 3 Patrice Lumumba Peoples' Friendship University of Russia (Moscow, Russia)
 1 ps_kuznetsov@mail.ru, 2 sinelnikov-ao@rudn.ru, 3 estebangutierrezrusia@gmail.com