Journals
Books
Articles by keyword sulfur hexafluoride
High Power Microwave Feeds
M.M. Gantsevich, A.V. Kharkov
Plasma-chemical etching of quartz glass by sulfur hexafluoride

G.R. Sagatelyan1, K.N. Bugorkov2, A.B. Solomashenko3, A.S. Kuznetsov4

1–4 Bauman Moscow State Technical University (National Research University) (Moscow, Russia)