L.V. Lysenko1, D.M. Akhmelkin2, V.K. Shatalov3, A.K. Gorbunov4

1, 2 JSC "Experimental Design Bureau of Microelectronics" (Kaluga, Russia)
3, 4 Kaluga branch of Bauman Moscow State Technical University
(National Research University) (Kaluga, Russia)
1–4 vkshatalov@yandex.ru