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Effect of heat treatment on the structural properties of vacuum coatings based on polyparaxylylene
A.N. Lantsev, A.P. Luchnikov, P.A. Luchnikov, A.A. Nazarenko
Effect of heat treatment on the structural properties of vacuum coatings based on polyparaxylylene
A.N. Lantsev, A.P. Luchnikov, P.A. Luchnikov, A.A. Nazarenko