A.N. Lantsev, A.P. Luchnikov, P.A. Luchnikov, A.A. Nazarenko

The results of experimental studies of structural and electrical properties of polymer film coatings of poly-n-xylylene, polychloro-n-xylylene and polydichlor-n-xylylene obtained by vapor deposition with the thickness of 0,1...12 µm are presented. The growth of the film on the substrate surface takes place in three main stages: adsorption of monomer on the substrate, free-radical polymerization and crystallization of the polymer chain supramolecular structure. By holding at temperatures above the glass transition temperature of the molecular structure of the polymer was carried out restructuring of the supramolecular structure of the polymer with the increase of crystallinity and uniformity of the film with the improvement of its basic physical properties.