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Articles by keyword physical vapor deposition (PVD)
The influence of technological factors of magnetron sputtering on the resistance of thin-film resistors

G.R. Sagatelyan1, S.Yu. Novikov2, A.V. Shishlov3

13 Bauman Moscow State Technical University (Moscow, Russia)
1 h_sagatelyan@mail.ru, 2 chyjd@yandex.ru, 3 orange_a@list.ru