A.A. Kornyukhin - Deputy Head of Work, FSUE «SPE «Toriy», Moscow. E-mail: kornand76@mail.ru
A.V. Krylov - Bazovye technologii vacuumnyh priborov, Moscow. E-mail: alexeykrylov@inbox.ru
O.U. Maslennikov - Deputy General Director, Bazovye technologii vacuumnyh priborov, Moscow. E-mail: maslennikov_o@mail.ru
T.K. Sigalova - FSUE «SPE «Toriy», Moscow. E-mail: moi-adress2012@yandex.ru

S.S. Shaposhnikov1, A.Yu. Taikin2, E.P. Sheshin3, A.S. Bugaev4

1-4 Moscow Institute of Physics and Technology (National Research University) (Dolgoprudny, Russia)

S.S. Shaposhnikov1, A.Yu. Taikin2, E.P. Sheshin3, A.S. Bugaev4

1–4 Moscow Institute of Physics and Technology (Dolgoprudny, Russia)