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Technological aspects of the manufacture of MMIC

А.G. Gudkov1, V.N. Vyuginov2, V.V. Popov3, Yu.V. Solov’ev4, N.К. Travin5, S.V. Chizhikov6,
R.V. Agandeev7, V.D. Sсhashurin8

1,6–8 Bauman Moscow State Technical University (Moscow, Russia)

2 Electronic Instrumentation at V.I. Ulyanov (Lenin) SPbGETU «LETI» (St. Petersburg, Russia)

3 PJSC «Svetlana» (St. Petersburg, Russia)

4,5 JSC «Svetlana-Electronpribor» (St. Petersburg, Russia)