E.V. Morozov

D.I. Zakharov

P. V. Lega

A.V. Mashirov

D.I. Zakharov

V.V. Koledov, D.S. Kuchin, V.G. Shavrov

C.G. Akatyeva

M.Y. Bekhtina

P.V. Lega

A.V. Korotitskiy, S.V. Gromov

V.S. Kalashnikov - Post-graduate Student, Kotel-nikov Institute of Radio Engineering, and Electronics Russian Academy of Sciences
A.V. Petrov - IRE RAS Post-graduate Student, Kotel-nikov Institute of Radio Engineering, and Electronics Russian Academy of Sciences
V.V. Koledov - Dr. Sc. (Phis.-Math.), Professor, Leading Researcher, Kotel-nikov Institute of Radio Engineering, and Electronics Russian Academy of Sciences

K.A. Borodako - Post-graduate Student, National Research Nuclear University MEPhI (Moscow). Е-mail: borodako_kir@mail.ru A.V. Shelyakov - Ph.D. (Phys.-Math.), Associate Professor, National Research Nuclear University MEPhI (Moscow) D.V. Sheyfer - Post-graduate Student, Deutsches Elektronen-Synchrotron DESY N.N. Sitnikov - Ph.D. (Eng.), Senior Research Scientist, FSUE Keldysh Research Center (Moscow) V.V. Koledov - Dr.Sc. (Phys.-Math.), Leading Research Scientist, Kotelnikov IRE RAS (Moscow)

N.M. Ushakov - Dr. Sc. (Phys.-Math.), Head of Laboratory of Submicron Electronics, Saratov branch of Kotel\'nikov IRE of RAS; Professor, Department «Electronics and telecommunications», Yuri Gagarin State Technical University of Saratov E-mail: nmu@bk.ru I.D. Kosobudsky - Dr. Sc. (Chem.), Leading Research Scientist, Laboratory of Submicron Electronics, Saratov branch of Kotel\'nikov IRE of RAS; Professor, Department of Chemistry, Yuri Gagarin State Technical University of Saratov E-mail: ikosobudskyi@gmail.com V.Ya. Podvigalkin - Ph. D. (Eng.), Leading Engineer, Laboratory of Submicron Electronics, Saratov branch of Kotel\'nikov IRE of RAS E-mail: podvigalkin@ya.ru

V.V. Koledov - Dr.Sc. (Phys.-Math.), Leading Research Scientist, Kotelnikov IRE RAS (Moscow) E.V. Morozov - Leading Engineer, Kotelnikov IRE RAS (Moscow) S.Y. Fedotov - Engeneer, Kotelnikov IRE RAS (Moscow) V.G. Shavrov - Dr.Sc. (Phys.-Math.), Head of Laboratory, Kotelnikov IRE RAS (Moscow) A.V. Shelyakov - Ph.D. (Phys.-Math.), Head of Laboratory, MEPhI

P.V. Lega

Kotel’nikov Institute of Radioengineering and Electronics of RAS (Moscow, Russia)

P.V. Lega1

1 Kotel’nikov Institute of Radioengineering and Electronics of RAS (Moscow, Russia)

A.V. Nesolenov1, V.V. Koledov2, V.S. Kalashnikov3, I.I. Musabirov4

1-3 Kotelnikov IRE RAS (Moscow, Russia)

4 IMSP RAS (Moscow, Russia)