Journals
Books
Articles by keyword ion etching
Ion-beam lithography in semiconductor technology of microwave microelectronics
V.V. Perinsky, V.N. Lyasnikov
Thermoelastic martensitic transition and shape memory effect in Ti2NiCu alloy at micro- and nanoscale

P.V. Lega

Kotel’nikov Institute of Radioengineering and Electronics of RAS (Moscow, Russia)

Thermoelastic martensitic transition and shape memory effect in Ti2NiCu alloy at micro- and nanoscale

P.V. Lega1

1 Kotel’nikov Institute of Radioengineering and Electronics of RAS (Moscow, Russia)

Investigation of ion beams of the gridless ion sources with floating and anode potential of the discharge chamber rear wall

D.S. Manegin1, V.D. Sokolov2, S.O. Shilov3, E.V. Vorobev4, O.P. Plotnikova5, S.G. Ivakhnenko6

1-6 SEC «Ion Plasma Technologies», BMSTU (Moscow, Russia)

1 manegin@bmstu.ru; 2 sokolovvd@bmstu.ru; 3 s.shilov@bmstu.ru; 4 evv@bmstu.ru; 5 plotnikova@bmstu.ru; 6 ivakhnenko@bmstu.ru