Journals
Books
Articles by keyword inductively coupled plasma
Concentration of Toxicant Chemical Elements in Organisms of State Fire-Fighting Service Personnel
I.I. Shantyr, М.А. Vlasenko, М.V. Yakovleva, I.E. Ushal, Е.М. Kharlamychev
Influence of process variable on properties of silicon nitride nano-thick films, deposited in inductively coupled plasma
A.E. Anurov, A.A. Danilov, A.A. Zhukov
Plasma-chemical etching of quartz glass by sulfur hexafluoride

G.R. Sagatelyan1, K.N. Bugorkov2, A.B. Solomashenko3, A.S. Kuznetsov4

1–4 Bauman Moscow State Technical University (National Research University) (Moscow, Russia)