M.D. Vorobyev, O.Y. Maslennikov, D.N. Yudaev, E.D. Orlova, L.A. Solovyeva

M.D. Vorobyev, O.Y. Maslennikov, D.N. Yudaev, E.D. Orlova, L.A. Solovyeva

V.A. Sergeev, I.V. Frolov, A.A. Shirokov, A.M. Nizametdinov's

E.A. Il-Iichev - Dr.Sc. (Phys.-Math.), Senior Research Scientist, National Research University of Electronic Technology. E-mail: edil44@mail.ru
S.A. Kostrjukov - Ph.D. (Phys.-Math.), Senior Research Scientist, Regional Center Probe Microscopy for Collective Use when Ryazan State Radio Engineering University. E-mail: me@rsreu.ru
G.P. Zhigal'skii - Dr.Sc. (Eng.), Professor, National Research University of Electronic Technology. E-mail: gp@zhigalskii.com
T.A. Kholomina - Dr.Sc. (Phys.-Math.), Professor, Head of Department «Biomedical and Semiconductor Electronics», Ryazan State Radio Engineering University. E-mail: me@rsreu.ru
V.G. Litvinov - Ph.D. (Phys.-Math.), Associate Professor, Department «Biomedical and Semiconductor Electronics», Ryazan State Radio Engineering University. E-mail: me@rsreu.ru

V.G. Palchikov1, Yu.S. Samokhvalov2, D.A. Parekhin3

1-3 FSUE “All-Russian Research Institute of Physico-Technical and Radiotechnical Measurements” (Mendeleevo, Russia)